Series of non-equilibrium stationary phase diagrams on diamond growth under different pressures of C-H system

Liu Zhijie,Zhang Wei,Wan Yongzhong,Wang Jitao
1998-01-01
Chinese journal of inorganic chemistry
Abstract:System pressures are important experimental coefficients in the deposition process of thin diamond films. If proper calculation method is chosen to predict diamond growth condition quantitatively, such mehtod can guide the experimental research on the subject. Based on non-equilibrium thermodynamic coupling model, stationary project phase diagrams on diamond growth were calculated and coordinated well with quantities of experimental results that had been published. Also, phase diagrams under different pressures for C-H system were systematically drawn in this paper and the principles of the variation of diamond growth region with different pressures were obtained. The phase diagrams all have diamond domain, which is very different from the diagrams based on classical equilibrium thermodynamics. In this way, the non-equilibrium coupling model settled the controdiction between the classical equilibrium thermodynamics and the experimental fact that the diamond can grow successively and graphite can be etched under low pressure. The calculated results can give quantitatively favorable guide to experimental research on diamond growth.
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