Phase diagrams for activated CVD diamond growth
Ji-Tao Wang,Yong-Zhong Wan,Zhi-Jie Liu,Hao Wang,David Wei Zhang,Zhong-Qiang Huang
DOI: https://doi.org/10.1016/S0167-577X(97)00123-7
IF: 3
1998-01-01
Materials Letters
Abstract:Non-equilibrium thermodynamics is successfully used for low pressure activated diamond syntheses. Binary carbon-hydrogen, carbon-oxygen, and ternary carbon-hydrogen-oxygen phase diagrams for activated low pressure diamond growth have been calculated on the base of a non-equilibrium thermodynamic coupling model. Theoretical results agree excellently with a lot of experimental data, especially, with Marinelli's critical experimental data.