Non-Equilibrium Coupling Model For Activated Cvd Diamond Growth

Jt Wang,Zq Huang,Qh Yang,Dw Zhang,Yz Wan
1996-01-01
Abstract:Based on the thermodynamic coupling model, phase diagrams of non-equilibrium stationary states of the activated CVD diamond growth not only for carbon-hydrogen system, but also for carbon-oxygen system and carbon-hydrogen-oxygen system can be calculated. Nearly all experimental data reported in the literature and summarized by Bachmann are dropped into the possible diamond growth region. The chemical transport reaction of CVD diamond reported by Spitsyn can also been explained by this model.
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