Phase diagrams for low pressure diamond synthesis in carbon-hydrogen-fluorine system

YongZhong Wan,Zhijie Liu,Wei Zhang,JiTao Wang
1997-01-01
Abstract:Ternary phase diagrams for low pressure diamond synthesis in carbon-hydrogen-fluorine (C-H-F) system are calculated. The change trend of diamond growth region with the change of substrate temperature and fluorine addition is studied. There is obvious difference in the change trend of diamond growth region between C-H-F and C-H-O systems, especially the diamond growth region would vanish when the fluorine content is higher than hydrogen content. These phase diagrams can optimize the composition of C-H-F system and substrate temperature.
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