Abstract:A low- or room-temperature bonding method was developed for fabrication of glass-based microfluidic chips without the requirement of clean environment and programmed high-temperature furnaces. After fundamental pretreatments, the glass substrates and cover plates to be bonded were sequentially soaked in concentrated sulfuric acid, washed with high-flow-rate tap water, de-ionized water and treated using HF steam as a necessary step. Finally, the plates were bonded by bringing the cleaned surfaces into close contact either under a continuous flow of de-ionized water or directly when treated with HF steam, and annealing at low-temperature (<100°C) or room-temperature. With the key improvements such as fabrication process optimization, gridding channel design and HF steam treatment, the glass-based chips could be obtained with fast, easy and high bonding yields (>90%). The bonding quality of the chips was evaluated by employing SEM, shear strength testing procedure and electric current measurement at different applied voltages. The mechanism for the strong bonding strength was presumably related to the formation of a hydrolyzed layer on the glass plate surfaces after soaking them in acid or water for extended periods. Microfluidic chips bonded by the above method were evaluated in the CE separation of monofuctional reactive dye Cy5-labeled bioamines.

Fabrication Of Microfluidic Chips By An Ultrasonic Micromachining With Wet-Etch Smoothing Method On Glass Substrates

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

Micro Etching Method Inside Microchannels

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Preparation of hybrid soda-lime/quartz glass chips with wettability-patterned channels for manipulation of flow profiles in droplet-based analytical systems.

Microfabrication of Capillary Electrophoresis chips

Fabricating Technologies of Nanofluidic Chips and Their Applications

Water-assisted femtosecond laser ablation for fabricating three-dimensional microfluidic chips

A Rapid and Low-Cost Procedure for Fabrication of Glass Microfluidic Devices

Fabrication Of Microfluidic Devices In Silica Glass By Water-Assisted Ablation With Femtosecond Laser Pulses

Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding

Fabrication of CE Microchip Based on SU8 and PMMA

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.

Glass etching to bridge micro- and nanofluidics.

Fabrication of Microfluidic Chips Using Laser Click Deposition