Fabrication of Microfluidic Chips Using Laser Click Deposition

Mengqi Lv,Xinyu He,Kai Zhou,Ben Niu,Wei,Haoran Li,Shasha Liu,Hua Su,Wei Wang

DOI: https://doi.org/10.1039/d2sd00060a

2022-01-01

Sensors & Diagnostics

Abstract:A programmable and low-cost laser click deposition method is proposed to form complicated patterns as master molds for microfluidic chips.

What problem does this paper attempt to address?

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Jian Bai,Zen-rong Zhu-ge,Xiaona Wang,Xiyun Hou,Guoguang Yang

DOI: https://doi.org/10.1117/12.576129

2004-01-01

Abstract:A novel micro-fabrication technology using optical radiation pressure is presented. A simulation program has been written and simulation results have demonstrated that micro silica or diamond particles, trapped by focused laser beam, could be used as micro-fabrication tools for nanometer manufacturing. An experiment setup for laser trapping has been established and Silica particles, with diameter of 8 μm, has been successfully trapped in water and arbitrary-shaped diamond particles, whose size is about 3-8 μm, has been trapped and rotated as micro-fabrication tools. When trapped rigidity micro-particles tools was controlled by laser beam, the work stage was horizontally moved repeatedly so that a machining trace of 2nm on work piece has been attained.
Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Jingjiang Qiu,Qing Gao,Haiming Zhao,Jianzhong Fu,Yong He

DOI: https://doi.org/10.1021/acsbiomaterials.7b00401

2017-01-01

ACS Biomaterials Science & Engineering

Abstract:In recent years, 3D integrated microfluidic systems have become increasingly more popular because of their ability to incorporate multifunctional components, including porous membranes and biological scaffolds. Because of limitations in resolution, fabrication efficiency and materials, it is hard to develop complex integrated microfluidic systems with low cost and high efficiency. In this paper, we present a novel method that utilizes modular structure-based design, which could greatly reduce the time and cost for customization of complete integrated chips, compared to traditional techniques. By printing sacrificial patterns on the substrate using the 3D printing approach and subsequently covering them with PDMS prepolymer, PDMS slices with modular structures were obtained, each with specific functions. By combining different PDMS slices with specific modular structures and other functional components, such as membranes and scaffolds, the conceptual design was efficiently converted into complete integrated microfluidic chips. As proof-of-concept, customized 3D microfluidic chips were generated and successfully used for cell culture and biological analysis. Furthermore, the flexible combination with biofabrication of hydrogel beads was also presented, revealing the potential use of this technique in the fabrication of organ-on-a-chip.
Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

Juan Wang,Yan He,Hong Xia,Li-Gang Niu,Ran Zhang,Qi-Dai Chen,Yong-Lai Zhang,Yan-Feng Li,Shao-Jiang Zeng,Jian-Hua Qin,Bing-Cheng Lin,Hong-Bo Sun

DOI: https://doi.org/10.1039/c003264f

IF: 7.517

2010-01-01

Lab on a Chip

Abstract:This paper demonstrates the embellishment of existing microfluidic devices with integrated three dimensional (3D) micronanostructures via femtosecond laser micronanofabrication, which, for the first time, proves two-photon photopolymerization (TPP) to be a powerful technology for chip functionalization. As representative examples, microsieves with various pore shape and adjustable pore size were successfully fabricated inside a conventional glass-based microfluidic channel prepared by wet etching for microparticle separation. Moreover, a fish scale like microfilter was also fabricated and appointed as a one-way valve, which showed excellent performance as we expected. These results indicate that such embellishment of microfluidic devices is simple, low cost, flexible and easy to access. We believe that, combined with TPP, the application of lab-on-chip devices would be further extended.
Fabricating Technologies of Nanofluidic Chips and Their Applications

He Qiaohong,Chen Shuang

2008-01-01

Progress in chemistry

Abstract:The studies on the fundamental nanofluidics and various applications of nanofluidic chips in chemical and biochemical analysis have achieved fast progress in recent years. Both fundamental and applied researches on nanofluidics need nanofluidic chips that can be fabricated by means of micro- and nanofabrication technologies. This review introduces the developed techniques for fabrication of nanofluidic chips, including mask machining method, sacrificial layer technology, mold-machining method, chemical-mechanical polishing method, mechanical drawing method, and other fabrication technologies. The applications of nanofluidic chips in sample pretreatment and biochemical analysis are reviewed.
Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

Bin-Bin Xu,Hong Xia,Qi-Dai Chen,Yong-Lai Zhang,Hong-Bo Sun

DOI: https://doi.org/10.1109/cleopr.2013.6600173

2013-01-01

Abstract:As a powerful 3D processing tool, femtosecond laser fabrication shows great potential to prototype various micronanostructures towards a wide range of applications. Herein, we introduced the nanofabrication of high-performance microfluidic chip through integrating functional components.
User-Friendly Microfabrication Method for Complex Topological Structure and Three-Dimensional Microchannel with the Application Prospect in Polymerase Chain Reaction (PCR)

Kangning Wang,Limin He,Andreas Manz,Wenming Wu

DOI: https://doi.org/10.1021/acs.analchem.0c03827

2021-01-26

Abstract:One of the most important challenges in the field of microfluidics is the rapid fabrication of microchips with complex topologies. Although the processing method of microfluidic chips has made brilliant achievements in the past 20 years, almost all traditional processing methods still face huge obstacles in the production of complex topologies and three-dimensional microchannel. Nowadays, the main methods of manufacturing microfluidic chips such as numerical control microprocessing, laser ablation, inkjet printing, photolithography, dry etching, and lithography, galvanoformung and abformung (LIGA) technology are not only inapplicable to the complex topological structure and the rapid processing of three-dimensional microfluidic chips but also rely on expensive processing equipment, complex manufacturing process, and low yield. To solve the problems of these traditional processing methods, we propose a low-cost methodology to obtain a microfluidic chip by sewing the chip pipe to the substrate with an embroidery machine as low as $6. Compared with the above-mentioned traditional microprocessing technologies, the new chip processing technology proposed by us does not involve professional microprocessing equipment and professional skills. Therefore, this new chip processing technology can significantly improve the efficiency of microprocessing.
Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Leyan Wang,Dongxian Zhang,Zhenghu Wen,Haijun Zhang

DOI: https://doi.org/10.1002/jemt.20722

2009-01-01

Microscopy Research and Technique

Abstract:This article reports a novel laser-induced micro-fabrication method and its monitoring system for three-dimensional (3D) microstructures. The mechanism of the method is that a small zone of thermoplastic material melted by laser heating grows in liquid surrounding environment, solidifying into a convex microstructure, such as micro-dot or micro-pillar. A laser diode (808 nm) with maximum power output of 130 mW is used as power source, and a kind of paraffin mixed with stearic acid and paint serves as the thermoplastic material for 3D microstructure formation experiments. A light microscope system consisting of a charge-coupled device (CCD) and a computer is utilized to realize real-time observation of the micro-fabricating process. The distribution of local temperature rise on material surface created by laser irradiation is simulated. The effects of liquid environment on microstructure formation have been theoretically analyzed and experimentally studied. Experiments are further carried out to investigate the relationship between laser spot and fabricated microstructures. The results indicate that the widths of microdots or micro-pillars are mostly determined by the size of focal spot, and their heights increase with the enlargement of laser power density. With this method, a micro-dot array of Chinese characters meaning "China" has been successfully fabricated through computer programming. This method has the advantages of implementing direct, mask-less, real-time and inexpensive 3D microstructure fabrication. Therefore, it would be widely applied in the fields of micro/nano-technology for practical fabrication of different kinds of 3D microstructures. Microsc. Res. Tech. 72:717-722, 2009. (C) 2009 Wiley-Liss, Inc.
Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Xianqiao Hu,Qiaohong He,Xiangbo Zhang,Hengwu Chen

DOI: https://doi.org/10.1007/s10404-010-0753-6

2010-01-01

Microfluidics and Nanofluidics

Abstract:A novel method for fabricating nano- or submicro-fluidic PMMA chips using photoresist-free UV-lithography and UV-assisted low-temperature bonding was developed. The nano- or submicro-channels were fabricated by exposing the PMMA substrate to the UV-light through a mask for a certain time. The PMMA substrate with channels and another flat PMMA cover sheet were pretreated with the UV-light for 2 h before they were brought together in running water. The bonding was carried out under a pressure of (1.19 ± 0.12) × 105 Pa and at a temperature of 45°C for 35 min. The chips bonded in this way could bear a tensile of 6.71 ± 2.50 MPa, and the deformation of the bonded channel was about 13%. A hybrid micro- and nano-fluidic PMMA chip fabricated with the developed method was demonstrated for the test of the electrokinetically driven ion enrichment and ion depletion.
Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Zhijiang Hu,Liang Yang,Bing Xu,Chenchu Zhang,Hongmei Zhong,Chen Xin,Kai Hu,Hao Wu,Yanlei Hu,Dong Wu

DOI: https://doi.org/10.1117/12.2506742

2019-01-01

Abstract:In the development of microfluidic systems, conventional 2D processing technologies are increasingly difficult to meet the requirement of integration of multifunctional components within a microchannel. Recently, two-photon polymerization (TPP) technology has emerged as a novel alternative to fabricate 3D microdevices functionalizing conventional microfluidic chips. Here, the development of TPP microfluidic technology comprising parallel fabrication, holographic patterning method and real-time lithography in a controlled flow is reported. And a series of functional microcomponents containing microfilters, microsorters, microtrap, tunable microlens are fabricated by above methods. The results indicate that the processing of microfluidic devices is simple, timesaving, low cost and programmable designability. The functional microchips are further used in blood cells sorting, biomedical sensing, microparticle purification and trapping with successful test results.
On‐chip Laser Processing for the Development of Multifunctional Microfluidic Chips

Huan Wang,Yong-Lai Zhang,Wei Wang,Hong Ding,Hong-Bo Sun

DOI: https://doi.org/10.1002/lpor.201600116

2017-01-01

Laser & Photonics Review

Abstract:In the development of microfluidic chips, conventional 2D processing technologies contribute to the manufacturing of basic microchannel networks. Nevertheless, in the pursuit of versatile microfluidic chips, flexible integration of multifunctional components within a tiny chip is still challenging because a chip containing micro-channels is a non-flat substrate. Recently, on-chip laser processing (OCLP) technology has emerged as an appealing alternative to achieve chip functionalization through in situ fabrication of 3D microstructures. Here, the recent development of OCLP-enabled multifunctional microfluidic chips, including several accessible photochemical/photophysical schemes, and photosensitive materials permiting OCLP, is reviewed. To demonstrate the capability of OCLP technology, a series of typical microcomponents fabricated using OCLP are introduced. The prospects and current challenges of this field are discussed.
A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

Xf Yin,S Hong,Zl Fang

DOI: https://doi.org/10.3321/j.issn:0253-3820.2003.01.028

2003-01-01

Abstract:This paper describes a procedure that makes it possible to design and fabricate microfluidic chips on glass substrates in a conventional chemical laboratory. A network of microfluidic channels was designed with a CAD program (Adobe Illustrator 8.0). This design was transferred onto a sheet of Konica film by a high-resolution laser setter. The Konica film was used as a mask for ultraviolet exposure in the photolithographic procedure. A 145 nm. Cr/570 nm Az - 1805 photoresist layer on the commercially available glass substrate was used as a sacrificial mask, which was effective for etching with 1 mol/L HF + 1 mol/L NaF at 50degreesC. The etching rate was 2 mum/min. After rigorously cleaning the etched and blank substrate,the two substrates were brought into close contact with each other in a flow of high purity water to avoid contamination from dust-particles in laboratory environment. Thus, the bonding quality was significantly improved. Using these improved fabrication techniques, high-quality microfluidic: chips. with channel-densities of 70/cm (70 mum channel width) can be routinely obtained in the conventional laboratory. The chips have been used successfully for the separation of amino acids and for polymerase chain reaction ( PCR) amplification.
A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

Mengying Zhang,Jinbo Wu,Limu Wang,Kang Xiao,Weijia Wen

DOI: https://doi.org/10.1039/b923101c

IF: 7.517

2010-01-01

Lab on a Chip

Abstract:We report a simple methodology to fabricate PDMS multi-layer microfluidic chips. A PDMS slab was surface-treated by trichloro (1H,1H,2H,2H-perfluorooctyl) silane, and acts as a reusable transferring layer. Uniformity of the thickness of the patterned PDMS layer and the well-alignment could be achieved due to the transparency and proper flexibility of this transferring layer. Surface treatment results are confirmed by XPS and contact angle testing, while bonding forces between different layers were measured for better understanding of the transferring process. We have also designed and fabricated a few simple types of 3D PDMS chip, especially one consisting of 6 thin layers (each with thickness of 50 mum), to demonstrate the potential utilization of this technique. 3D fluorescence images were taken by a confocal microscope to illustrate the spatial characters of essential parts. This fabrication method is confirmed to be fast, simple, repeatable, low cost and possible to be mechanized for mass production.

chemistry, analytical,nanoscience & nanotechnology,biochemical research methods,instruments & instrumentation, multidisciplinary
High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Bing Xu,Wen-Qiang Du,Jia-Wen Li,Yan-Lei Hu,Liang Yang,Chen-Chu Zhang,Guo-Qiang Li,Zhao-Xin Lao,Jin-Cheng Ni,Jia-Ru Chu,Dong Wu,Su-Ling Liu,Koji Sugioka

DOI: https://doi.org/10.1038/srep19989

IF: 4.6

2016-01-01

Scientific Reports

Abstract:High efficiency fabrication and integration of three-dimension (3D) functional devices in Lab-on-a-chip systems are crucial for microfluidic applications. Here, a spatial light modulator (SLM)-based multifoci parallel femtosecond laser scanning technology was proposed to integrate microstructures inside a given ‘Y’ shape microchannel. The key novelty of our approach lies on rapidly integrating 3D microdevices inside a microchip for the first time, which significantly reduces the fabrication time. The high quality integration of various 2D-3D microstructures was ensured by quantitatively optimizing the experimental conditions including prebaking time, laser power and developing time. To verify the designable and versatile capability of this method for integrating functional 3D microdevices in microchannel, a series of microfilters with adjustable pore sizes from 12.2 μm to 6.7 μm were fabricated to demonstrate selective filtering of the polystyrene (PS) particles and cancer cells with different sizes. The filter can be cleaned by reversing the flow and reused for many times. This technology will advance the fabrication technique of 3D integrated microfluidic and optofluidic chips.
3D Printing of Individualized Microfluidic Chips with DLP-Based Printer

Jingjiang Qiu,Junfu Li,Zhongwei Guo,Yudong Zhang,Bangbang Nie,Guochen Qi,Xiang Zhang,Jiong Zhang,Ronghan Wei

DOI: https://doi.org/10.3390/ma16216984

IF: 3.4

2023-11-01

Materials

Abstract:Microfluidic chips have shown their potential for applications in fields such as chemistry and biology, and 3D printing is increasingly utilized as the fabrication method for microfluidic chips. To address key issues such as the long printing time for conventional 3D printing of a single chip and the demand for rapid response in individualized microfluidic chip customization, we have optimized the use of DLP (digital light processing) technology, which offers faster printing speeds due to its surface exposure method. In this study, we specifically focused on developing a fast-manufacturing process for directly printing microfluidic chips, addressing the high cost of traditional microfabrication processes and the lengthy production times associated with other 3D printing methods for microfluidic chips. Based on the designed three-dimensional chip model, we utilized a DLP-based printer to directly print two-dimensional and three-dimensional microfluidic chips with photosensitive resin. To overcome the challenge of clogging in printing microchannels, we proposed a printing method that combined an open-channel design with transparent adhesive tape sealing. This method enables the rapid printing of microfluidic chips with complex and intricate microstructures. This research provides a crucial foundation for the development of microfluidic chips in biomedical research.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips

Ho Nam Chan,Yangfan Chen,Yiwei Shu,Yin Chen,Qian Tian,Hongkai Wu

DOI: https://doi.org/10.1007/s10404-014-1542-4

2015-01-10

Microfluidics and Nanofluidics

Abstract:AbstractIn this work, we developed a convenient, one-step soft-lithographic-based molding technique for molding truly 3D microfluidic channels in polydimethylsiloxane (PDMS) by overcoming two grand challenges. We optimized the post-treatment conditions for 3D-printed resin structures to facilitate the use of them as masters for PDMS replica molding. What is more important, we demonstrated a novel method for single-step molding from 3D-printed microstructures to generate truly 3D microfluidic networks easily. With this technique, we fabricated some key, functional 3D microfluidic structures and components including a basket-weaving network, a 3D chaotic advective mixer and microfluidic peristaltic valves. Furthermore, an interesting “injection-on-demand” microfluidic device was also demonstrated. Our technique offers a simple, fast route to the fabrication of 3D microfluidic chips in a short time without clean-room facilities.

physics, fluids & plasmas,nanoscience & nanotechnology,instruments & instrumentation
Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Tao Wang,Jing Chen,Tianfeng Zhou,Lu Song

DOI: https://doi.org/10.3390/mi9060269

IF: 3.4

2018-05-29

Micromachines

Abstract:Compared with polymer-based biochips, such as polydimethylsiloxane (PDMS), glass based chips have drawn much attention due to their high transparency, chemical stability, and good biocompatibility. This paper investigated the glass molding process (GMP) for fabricating microstructures of microfluidic chips. The glass material was D-ZK3. Firstly, a mold with protrusion microstructure was prepared and used to fabricate grooves to evaluate the GMP performance in terms of roughness and height. Next, the molds for fabricating three typical microfluidic chips, for example, diffusion mixer chip, flow focusing chip, and cell counting chip, were prepared and used to mold microfluidic chips. The analysis of mold wear was then conducted by the comparison of mold morphology, before and after the GMP, which indicated that the mold was suitable for GMP. Finally, in order to verify the performance of the molded chips by the GMP, a mixed microfluidic chip was chosen to conduct an actual liquid filling experiment. The study indicated that the fabricating microstructure of glass microfluidic chip could be finished in 12 min with good surface quality, thus, providing a promising method for achieving mass production of glass microfluidic chips in the future.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

Chenchu Zhang,Yanlei Hu,Wenqiang Du,Peichao Wu,Shenglong Rao,Ze Cai,Zhaoxin Lao,Bing Xu,Jincheng Ni,Jiawen Li,Gang Zhao,Dong Wu,Jiaru Chu,Koji Sugioka

DOI: https://doi.org/10.1038/srep33281

IF: 4.6

2016-01-01

Scientific Reports

Abstract:Rapid integration of high-quality functional devices in microchannels is in highly demand for miniature lab-on-a-chip applications. This paper demonstrates the embellishment of existing microfluidic devices with integrated micropatterns via femtosecond laser MRAF-based holographic patterning (MHP) microfabrication, which proves two-photon polymerization (TPP) based on spatial light modulator (SLM) to be a rapid and powerful technology for chip functionalization. Optimized mixed region amplitude freedom (MRAF) algorithm has been used to generate high-quality shaped focus field. Base on the optimized parameters, a single-exposure approach is developed to fabricate 200 × 200 μm microstructure arrays in less than 240 ms. Moreover, microtraps, QR code and letters are integrated into a microdevice by the advanced method for particles capture and device identification. These results indicate that such a holographic laser embellishment of microfluidic devices is simple, flexible and easy to access, which has great potential in lab-on-a-chip applications of biological culture, chemical analyses and optofluidic devices.
Research Progress on Fabrication of Functional Microfluidic Chips Using Femtosecond Laser Direct Writing Technology

Shi Yang,Xu Bing,Wu Dong,Xiao Yi,Hu Yanlei,Yao Chengli

DOI: https://doi.org/10.3788/cjl201946.1000001

2019-01-01

Abstract:Femtosecond laser direct writing technology has been extensively used for the preparation of functional microfluidic chips because of ultrashort pulse duration and extremely high peak intensity of femtosecond lasers. This study summarizes the following three research directions based on the direct writing technology of femtosecond lasers for microfluidic chips: the integration technology of functional devices fabricated by femtosecond lasers in microfluidic chips with different materials, the multi-functional applications of microfluidic chips integrated by femtosecond lasers, and the rapid processing of microfluidic chips using femtosecond lasers. Furthermore, according to the summaries on the research results of femtosecond laser direct writing technology in the field of microfluidics, this study provides a reference for the research, application, and future development of the microfluidic chips prepared using femtosecond laser direct writing technology.
Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Dong Wu,Si Zhu,Jian Xu,Koji Sugioka,Katsumi Midorikawa

DOI: https://doi.org/10.1109/cleopr.2013.6600018

2013-01-01

Abstract:We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.
Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application

Yu Hongbin,Zhou Guangya,Chau Fook Siong,Wang Shouhua,Lee Feiwen

DOI: https://doi.org/10.1016/j.snb.2008.11.035

2009-04-02

Abstract:A novel method is presented for fabricating PDMS-based microchannel. The mold consists of a tunable PDMS structure rather than the commonly used SU-8 mold with fixed shape. This structure is prepared by transferring the desired microchannel pattern into one PDMS substrate via soft lithography and bonding it to a spin-coated PDMS membrane with the oxygen plasma activated technology. Through applying proper pressure to this structure and keeping it constant during the whole molding process, the resulted membrane deformation shape with rounded cross-sectional contour is totally replicated into the device layer, constituting the final main body of the microchannel. Besides the inherent feature of rounded cross-section provided by this method, the depth of the microchannel can be easily controlled by changing the pressure. At the same time, through designing different widths at different positions in one microchannel, it is straightforward to realize microchannel structure with multi-depth in one step using one photomask. Both of these characteristics have been successfully demonstrated in our experiments and it will definitely find wide applications in lab-on-a-chip area.

Fabrication of Microfluidic Chips Using Laser Click Deposition

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

Fabricating Technologies of Nanofluidic Chips and Their Applications

Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

User-Friendly Microfabrication Method for Complex Topological Structure and Three-Dimensional Microchannel with the Application Prospect in Polymerase Chain Reaction (PCR)

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

On‐chip Laser Processing for the Development of Multifunctional Microfluidic Chips

A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

3D Printing of Individualized Microfluidic Chips with DLP-Based Printer

Direct, one-step molding of 3D-printed structures for convenient fabrication of truly 3D PDMS microfluidic chips

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

Research Progress on Fabrication of Functional Microfluidic Chips Using Femtosecond Laser Direct Writing Technology

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Novel polydimethylsiloxane (PDMS) based microchannel fabrication method for lab-on-a-chip application