Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

High-speed two-photon lithography based on femtosecond laser

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Research Progress on Fabrication of Functional Microfluidic Chips Using Femtosecond Laser Direct Writing Technology

Femtosecond Laser Rapid Prototyping of Nanoshells and Suspending Components Towards Microfluidic Devices

Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

On‐chip Laser Processing for the Development of Multifunctional Microfluidic Chips

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Ship-in-a-bottle Integration by Hybrid Femtosecond Laser Processing for Fabrication of Highly Functional Biochips

Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments

Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Femtosecond Laser Direct Writing of Ion Exchangeable Multifunctional Microstructures.

Direct Laser Writing Breaking Diffraction Barrier Based on Two-Focus Parallel Peripheral-Photoinhibition Lithography

Micro-fabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization