Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Dong Wu,Si Zhu,Jian Xu,Koji Sugioka,Katsumi Midorikawa

DOI: https://doi.org/10.1109/cleopr.2013.6600018

2013-01-01

Abstract:We propose a novel strategy which fuses femtosecond laser TPP and FLAE to integrate 3D complex polymer microdevices into glass-based microfluidic devices for highly functional applications. 3D microfilters were fabricated, showing excellent filtering functions.