Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Freeform microfluidic networks encapsulated in laser printed three-dimensional macro-scale glass objects

Freeform Microfluidic Networks Encapsulated in Laser‐Printed 3D Macroscale Glass Objects

Hybrid Laser Microfabrication of Three-Dimensional Large-Scale Fused Silica Microfluidic Chips

Fabrication of Large-Volume Microfluidic Chamber Embedded in Glass Using Three-Dimensional Femtosecond Laser Micromachining

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Freeform laser and inkjet printing of biological constructs

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Three-dimensional Microfluidic Channel with Arbitrary Length and Configuration Fabricated Inside Glass by Femtosecond Laser Direct Writing.

Rapid Prototyping of Three-Dimensional Microfluidic Mixers in Glass by Femtosecond Laser Direct Writing

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

Femtosecond Laser Fabricated Electrofluidic Devices In Glass For 3d Manipulation Of Biological Samples

Scalable Printing of Bionic Multiscale Channel Networks Through Digital Light Processing-Based Three-Dimensional Printing Process.

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

Fabrication of microchannels by space-selective control of phase separation in glass.

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Self-Sealed Bionic Long Microchannels with Thin Walls and Designable Nanoholes Prepared by Line-Contact Capillary-Force Assembly

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Direct Fabrication of Homogeneous Microfluidic Channels Embedded in Fused Silica Using a Femtosecond Laser