Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Ship-in-a-bottle integration by hybrid femtosecond laser technology for fabrication of true 3D biochips

Hybrid Femtosecond Laser Microfabrication to Achieve True 3D Glass/polymer Composite Biochips with Multiscale Features and High Performance: the Concept of Ship‐in‐a‐bottle Biochip

Ship-in-a-bottle Integration by Hybrid Femtosecond Laser Processing for Fabrication of Highly Functional Biochips

Ship-in-a-Bottle Biomicrochips Fabricated by Hybrid Femtosecond Laser Processing

Micro and Nano- Biomimetic Structures for Cell Migration Study Fabricated by Hybrid Subtractive and Additive 3d Femtosecond Laser Processing

Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments

Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing

Hybrid Subtractive and Additive Micromanufacturing Using Femtosecond Laser for Fabrication of True 3D Biochips

3D Biomimetic Chips for Cancer Cell Migration in Nanometer-Sized Spaces Using "Ship-in-a-bottle" Femtosecond Laser Processing

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

[INVITED]Two photon polymerization integration of microlens arrays into 3D glass microchannel for cell counting

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration.

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis