Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration.

High Throughput Laser Nano Direct Writing Technique

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Laser Direct Writing Using Submicron-Diameter Fibers.

Femtosecond laser micromachining and microfabrication in transparent materials

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

Fabrication of microchannels by space-selective control of phase separation in glass.

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Water-assisted Laser Drilling of High-Aspect-ratio 3D Microchannels in Glass with Spatiotemporally Focused Femtosecond Laser Pulses

Direct Laser Writing Breaking Diffraction Barrier Based on Two-Focus Parallel Peripheral-Photoinhibition Lithography

Freeform microfluidic networks encapsulated in laser printed three-dimensional macro-scale glass objects

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Three-dimensional laser printing of macro-scale glass objects at a micro-scale resolution

Ship-in-a-bottle integration by hybrid femtosecond laser technology for fabrication of true 3D biochips

Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Glass etching to bridge micro- and nanofluidics.

Manufacture of Three-Dimensional Optofluidic Spot-Size Converters in Fused Silica Using Hybrid Laser Microfabrication