Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

monolithically integrated into 3 D glass micro fl uidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis †

Femtosecond Laser Fabricated Electrofluidic Devices In Glass For 3d Manipulation Of Biological Samples

Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser

Electrical Manipulation of Biological Samples in Glass-Based Electrofluidics Fabricated by 3D Femtosecond Laser Processing

Fabrication of microchannels by space-selective control of phase separation in glass.

Ultrafast Fabrication of Micro-Channels and Graphite Patterns on Glass by Nanosecond Laser-Induced Plasma-Assisted Ablation (lipaa) for Electrofluidic Devices

Fabrication of microfluidic on fused silica glass surface assisted by femtosecond laser

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Three-dimensional Microfluidic Channel with Arbitrary Length and Configuration Fabricated Inside Glass by Femtosecond Laser Direct Writing.

Direct Fabrication of Homogeneous Microfluidic Channels Embedded in Fused Silica Using a Femtosecond Laser

Laser multifunctional fabrication of metallic microthermal components embedded in fused silica for microfluidic applications

Microspatially modulating hydrophilic/hydrophobic property on glass surface using femtosecond laser direct writing

Micro-nano fabrication of femtosecond laser wet etch

Freeform microfluidic networks encapsulated in laser printed three-dimensional macro-scale glass objects

Rapid Prototyping of Three-Dimensional Microfluidic Mixers in Glass by Femtosecond Laser Direct Writing