Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

M.S. Giridhar,Kibyung Seong,Axel Schülzgen,Pramod Khulbe,Nasser Peyghambarian,Masud Mansuripur

DOI: https://doi.org/10.1364/AO.43.004584

2017-08-28

Abstract:We describe a technique for surface and sub-surface micro-machining of glass substrates using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. Although silicate glass is normally transparent at this wavelength, the extremely high intensity of the focused beam causes multi-photon absorption, resulting in localized ablation of the glass substrate. Ablation is strictly confined to the vicinity of focus, leaving the rest of the substrate unaffected. We exploit this phenomenon to drill a micro-hole through a thin vertical wall that separates two adjacent pits machined by the same laser in a glass plate. A salient feature of pulsed laser micro-machining, therefore, is its ability to drill sub-surface tunnels and canals into glass substrates, a process that requires multiple steps in standard lithography. To demonstrate a potential application of this micro-machining technique, we have fabricated simple micro-fluidic structures on a glass plate. To prevent the evaporation of liquids in open micro-channels and micro-chambers thus fabricated requires a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate. This point-to-point contacting is essential if the fluids are to remain confined within their various channels and chambers on the chip, without leaking into neighboring regions. Methods of protecting and sealing the micro-machined structures for microfluidic applications are also discussed.

Applied Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to use femtosecond pulsed lasers for surface and subsurface micromachining on glass substrates to fabricate microfluidic devices. Specifically, the researchers have developed a technique. By focusing femtosecond laser pulses with a wavelength of 1,660 nanometers, multiphoton absorption of local materials on the glass substrate is achieved, which leads to local ablation of the materials. This method can precisely drill micropores or channels on the glass substrate without affecting other parts of the substrate. In addition, the research also explores how to use polydimethylsiloxane (PDMS) to cover and seal these micromachined structures to prevent liquid evaporation and ensure the effective transfer of liquid in the microfluidic device between different channels and chambers without leakage. This technique is of great significance for the rapid prototyping of biochip devices, especially in applications where efficient transfer of biomolecules and other chemical substances is required.