Laser Direct Writing Using Submicron-Diameter Fibers.

Feng Tian,Guoguang Yang,Jian Bai,Jianfeng Xu,Changlun Hou,Yiyong Liang,Kaiwei Wang

DOI: https://doi.org/10.1364/oe.17.019960

IF: 3.8

2009-01-01

Optics Express

Abstract:In this paper, a novel direct writing technique using submicron-diameter fibers is presented. The submicron-diameter fiber probe serves as a tightly confined point source and it adopts micro touch mode in the process of writing. The energy distribution of direct writing model is analyzed by Three-Dimension Finite-Difference Time-Domain method. Experiments demonstrate that submicron-diameter fiber direct writing has some advantages: simple process, 350-nm-resolution (lower than 442-nm-wavelength), large writing area, and controllable width of lines. In addition, by altering writing direction of lines, complex submicron patterns can be fabricated.