Abstract:Miniaturization,integration,and flexible deformation are the future development trends of optical devices.Meanwhile,optical systems based on integrated micro-optical devices stand out for their low power consumption,fast response,and high information storage capacity.However,current high-precision micro/nano processing methods,such as FIB （Focused Ion Beam） and semiconductor lithography,are far too complex and in lack of flexibility.Femtosecond laser,as a non-contact,high-precision,high-intensity tool for"cold"processing,is particularly favored in micro/nano processing.This review first elucidated the background and mechanism of femtosecond laser micromachining used in optical device.After that,we discussed a number of methods employed to improve the resolution of femtosecond micromachining.Then we listed various advanced processing means based on femtosecond laser and systematically summarized recent representative research developments of femtosecond laser micromachining used in microlens,gratings,optical waveguides,and photonic crystals.Finally,we concluded the challenges and the directions for further development of femtosecond laser machining in the field of micro-optical devices.

Femtosecond Laser Rapid Prototyping of Nanoshells and Suspending Components Towards Microfluidic Devices

High-speed two-photon lithography based on femtosecond laser

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Rapid Prototyping And Its Applications To Micro-Nanodevices

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Study on the Microfabrication Technique by Femtosecond Laser Two-Photon Photopolymerization

Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

High Precision Femtosecond Laser Prototyping of Micro-Optical Components

Research Progress on Fabrication of Functional Microfluidic Chips Using Femtosecond Laser Direct Writing Technology

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

Three Dimensional Functional Microfluidic Chips Fabricated by Hybrid Femtosecond Laser Microfabrication

Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Size-dependent behaviors of femtosecond laser-prototyped polymer micronanowires.

Micro-fabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization

Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Femtosecond laser micromachining optical devices