Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Optimized Holographic Femtosecond Laser Patterning Method Towards Rapid Integration of High-Quality Functional Devices in Microchannels.

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Integration of Functional Microstructures Inside a Microfluidic Chip by Direct Femtosecond Laser Writing

Embellishment of Microfluidic Devices Via Femtosecond Laser Micronanofabrication for Chip Functionalization

Rapid Fabrication of High-Resolution Multi-Scale Microfluidic Devices Based on the Scanning of Patterned Femtosecond Laser.

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Functional Shape-Morphing Microarchitectures Fabricated by Dynamic Holographically Shifted Femtosecond Multifoci

Femtosecond Laser Hybrid Fabrication of a 3D Microfluidic Chip for PCR Application

Rapid Customization of 3d Integrated Microfluidic Chips Via Modular Structure-Based Design

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

An Improved Multi-Exposure Approach for High Quality Holographic Femtosecond Laser Patterning

Femtosecond Laser Rapid Prototyping of Nanoshells and Suspending Components Towards Microfluidic Devices

Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

On‐chip Laser Processing for the Development of Multifunctional Microfluidic Chips

Three Dimensional Micro-Mechanical And Micro-Optical Devices Fabricated By Holographic Two-Photon Lithography

Amplitude-phase Optimized Long Depth of Focus Femtosecond Axilens Beam for Single-Exposure Fabrication of High-Aspect-ratio Microstructures

Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Ultrafast Laser Fabrication of Functional Biochips: New Avenues for Exploring 3D Micro- and Nano-Environments

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process