Direct Laser Writing of Complex Microtubes Using Femtosecond Vortex Beams
Liang Yang,Dongdong Qian,Chen Xin,Zhijiang Hu,Shengyun Ji,Dong Wu,Yanlei Hu,Jiawen Li,Wenhao Huang,Jiaru Chu
DOI: https://doi.org/10.1063/1.4984744
IF: 4
2017-01-01
Applied Physics Letters
Abstract:Microfabrication by using structured laser beams provides a rapid and facile way for creating some specific microstructures. As an important member in the structured beam category, optical vortices can be easily generated by a helical phase and focused into a geometry-tunable pattern by an objective. In this work, optical vortices with diverse intensity distributions, e.g., different sizes, geometries, and deflection angles, are generated by controlling the phase factors imprinted on optical vortices, including topological charge, fold number, and modulation depth, respectively. The focusing properties of the measured optical vortices in a high numerical aperture laser microfabrication system agree with the theoretical calculation by the Debye vectorial diffraction theory. Three dimensional complex microtubes are rapidly realized by simply scanning the optical vortices along a designed route in a photoresist. With this method, microtubes with controlled diameters, polygonal geometry, winding edges, and even 3D spiral microtubes are facilely achieved.