Abstract:Micro/nano structures with morphological gradients possess unique physical properties and significant applications in various research domains. This study proposes a straightforward and precise method for fabricating micro/nano structures with morphological gradients utilizing single-voxel synchronous control and a nano-piezoelectric translation stage in a two-photon laser direct writing technique. To address the defocusing issue in large-scale fabrication, a methodology for laser focus dynamic proactive compensation was developed based on fluorescence image analysis, which can achieve high-precision compensation of laser focus within the entire range of the nano-piezoelectric translation stage. Subsequently, the fabrication of micro/nano dual needle structures with morphological gradients were implemented by employing different writing speeds and voxel positions. The minimum height of the tip in the dual needle structure is 80 nm, with a linewidth of 171 nm, and a dual needle total length reaching 200 μm. Based on SEM (scanning electron microscope) and AFM (atomic force microscope) characterization, the dual needle structures fabricated by the method proposed in this study exhibit high symmetry and nanoscale gradient accuracy. Additionally, the fabrication of hexagonal lattice periodic structures assembled from morphological gradient needle structures and the size gradient Archimedean spiral structures validate the capability of the single voxel-based fabrication and proactive focus compensation method for complex gradient structure fabrication.

Two-photon Polymerization of Microstructures by a Non-Diffraction Multifoci Pattern Generated from a Superposed Bessel Beam.

High-speed two-photon lithography based on femtosecond laser

Two-photon Polymerization of a Three Dimensional Structure Using Beams with Orbital Angular Momentum

Generation of Bessel-beam arrays for parallel fabrication in two-photon polymerization

Pinpoint Two-Photon Writing And Multi-Beam Interferential Patterning Of Three-Dimensional Polymer Photonic Crystals

Fabrication of Double-Helix Microstructures by Two-Photon Polymerization

An Improved Multi-Exposure Approach for High Quality Holographic Femtosecond Laser Patterning

Single-Exposure Multiphoton Fabrication of Polygonized Structures by an Slm-Modulated Fresnel Zone Lens

Abruptly Autofocusing Vortex Beams for Rapid Controllable Femtosecond Two-Photon Polymerization

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Two-Photon Polymerization of a 3D Structure Using Focus Engineering

Fabrication of High-Aspect-ratio Structures Using Bessel-beam-activated Photopolymerization

Rapid Two‐Photon Polymerization of an Arbitrary 3D Microstructure with 3D Focal Field Engineering

Micro/nanofabrication of Two and Three Dimensional Structures by Two-Photon Polymerization

Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Optical Microstructures Fabricated by Femtosecond Laser Two-Photon Polymerization

Femtosecond Mathieu Beams for Rapid Controllable Fabrication of Complex Microcages and Application in Trapping Microobjects

Multiple-Spot Parallel Processing For Laser Micronanofabrication

Fabrication Of Three Dimensional Micro Devices By Means Of Two Photon Photopolymerization

Fabrication of Micro/Nano Dual Needle Structures with Morphological Gradient Based on Two-Photon Polymerization Laser Direct Writing with Proactive Focus Compensation

Fabrication of Chiral 3D Microstructure Using Tightly Focused Multiramp Helico-Conical Optical Beams