Abstract:Nanofabrication techniques that can generate large and complex 3D structures with nanoscale features are becoming increasingly important in the fields of biomedicine, micro-optics, and microfluidics. Direct laser writing via two-photon polymerization (DLW-TPP) is one such technique that relies on nonlinear absorption of light to form nanoscale 3D features. Although DLW-TPP provides the required nanoscale resolution, its built height is often limited to less than a millimetre. This height limitation is driven by the need to tightly focus the laser beam at arbitrary depths within the photopolymer. This requirement necessitates matching the photopolymer's refractive index to specific values but the required techniques have not been disseminated widely in the open scientific literature. To address this knowledge gap, we test two universal, different approaches to generate refractive index-matched polymeric and preceramic resins and demonstrate their performance by printing of fine submicron features in 3D structures as tall as 2.5 mm. Specifically, we achieve index-matching by mixing commercially-available resins or covalent modification of functional monomers. This work investigates the relationship of voxel shape to RI mismatch, and presents tuning of RI through mixing and covalent modification to a nonconventional material system of preceramic resin which has never been demonstrated before. We demonstrate the material flexibility by generating 3D silicon oxycarbide structures from preceramic resists while simultaneously eliminating the part-height limitation of conventional DLW-TPP.

Pinpoint Two-Photon Writing And Multi-Beam Interferential Patterning Of Three-Dimensional Polymer Photonic Crystals

High-speed two-photon lithography based on femtosecond laser

Subdiffraction 3D Nanolithography by Two‐Photon Two‐Step Absorption and Photoinhibition

High-Reproducibility And High-Fidelity Two-Photon Photopolymerization Of 3d Photonic Crystals

Two-photon micromachining for functional photonic crystals

Fabrication of Large Area Two- and Three-Dimensional Polymer Photonic Crystals Using Single Refracting Prism Holographic Lithography

Fabrication of Two-Dimensional Photonic Crystals with Controlled Defects by Combination of Holographic Lithography and Two-Photon Polymerization

Two-Photon Polymerization for Three-Dimensional Photonic Devices in Polymers and Nanocomposites

Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

&Lt;title>formation of Photonic Crystals by Femtosecond Laser Microfabrication</title>

Micro/nanofabrication of Two and Three Dimensional Structures by Two-Photon Polymerization

Two-photon Polymerization of Microstructures by a Non-Diffraction Multifoci Pattern Generated from a Superposed Bessel Beam.

Shape Precompensation In Two-Photon Laser Nanowriting Of Photonic Lattices

Two-photon Photopolymerization As a Tool for Making Micro-Devices

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

Direct Writing of Photonic Structures by Two-Photon Polymerization

Two-photon Polymerization of a Three Dimensional Structure Using Beams with Orbital Angular Momentum

Parallel Direct Laser Writing of Micro-Optical and Photonic Structures Using Spatial Light Modulator

Refractive index matched polymeric and preceramic resins for height-scalable two-photon lithography

Tunable Multilayer Submicrostructures Fabricated By Interference Assisted Two-Photon Polymerization

Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering