Abstract:Nanofabrication techniques that can generate large and complex 3D structures with nanoscale features are becoming increasingly important in the fields of biomedicine, micro-optics, and microfluidics. Direct laser writing via two-photon polymerization (DLW-TPP) is one such technique that relies on nonlinear absorption of light to form nanoscale 3D features. Although DLW-TPP provides the required nanoscale resolution, its built height is often limited to less than a millimetre. This height limitation is driven by the need to tightly focus the laser beam at arbitrary depths within the photopolymer. This requirement necessitates matching the photopolymer's refractive index to specific values but the required techniques have not been disseminated widely in the open scientific literature. To address this knowledge gap, we test two universal, different approaches to generate refractive index-matched polymeric and preceramic resins and demonstrate their performance by printing of fine submicron features in 3D structures as tall as 2.5 mm. Specifically, we achieve index-matching by mixing commercially-available resins or covalent modification of functional monomers. This work investigates the relationship of voxel shape to RI mismatch, and presents tuning of RI through mixing and covalent modification to a nonconventional material system of preceramic resin which has never been demonstrated before. We demonstrate the material flexibility by generating 3D silicon oxycarbide structures from preceramic resists while simultaneously eliminating the part-height limitation of conventional DLW-TPP.

High-Reproducibility And High-Fidelity Two-Photon Photopolymerization Of 3d Photonic Crystals

High-speed two-photon lithography based on femtosecond laser

Subdiffraction 3D Nanolithography by Two‐Photon Two‐Step Absorption and Photoinhibition

Pinpoint Two-Photon Writing And Multi-Beam Interferential Patterning Of Three-Dimensional Polymer Photonic Crystals

Two-photon micromachining for functional photonic crystals

Shape Precompensation In Two-Photon Laser Nanowriting Of Photonic Lattices

Photonic Crystal Structures with Submicrometer Spatial Resolution Achieved by High-Power Femtosecond Laser-Induced Photopolymerization

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&Lt;title>formation of Photonic Crystals by Femtosecond Laser Microfabrication</title>

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Recent Progress of Lithographic Micro Fabrication by the Tpa-Induced Photopolymerization

Refractive index matched polymeric and preceramic resins for height-scalable two-photon lithography

Optical Fabrication of Three-Dimensional Polymeric Microstructures

Two-Photon Photopolymerization and Diagnosis of Three-Dimensional Microstructures Containing Fluorescent Dyes

Fabrication Of Three Dimensional Micro Devices By Means Of Two Photon Photopolymerization

Two-Photon Polymerization of a 3D Structure Using Focus Engineering

Micro-fabrication technology by femtosecond laser direct scanning using two-photon photo-polymerization