Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

In Situ Fabrication of a Tunable Microlens.

Femtosecond laser micromachining optical devices

Single-pulse Writing of a Concave Microlens Array.

Optical Nanofabrication of Concave Microlens Arrays

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Control of Diameter and Numerical Aperture of Microlens by a Single Ultra-Short Laser Pulse

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse

Femtosecond Laser Nano-Fabrication With Extended Processing Range

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Fabrication of A Liquid Crystal Light Modulator by Use of Femtosecond-Laser-Induced Nanoripples

Comparative analysis of microlens array formation in fused silica glass by laser: femtosecond versus picosecond pulses