Micro-nano fabrication of femtosecond laser wet etch
陈烽,杨青,边浩,杜广庆,柳克银,孟祥卫,邓泽方,山超
DOI: https://doi.org/10.5768/JAO201435.0107001
2014-01-01
Journal of Applied Optics
Abstract:In recent years, the femtosecond laser becomes a promising tool to fabricate 3D microstructures for their applications in micro-optics, microfluidics and biofabrication. Various femtosecond-laser-based processes have been used for machining high-precise microstructures with arbitrary shapes. However, the efficiency problem of the femtosecond laser micro-fabrication has hindered its practical applications. Here we present a simple, high-efficient maskless technique to fabricate 3D microstructures on glasses using a femtosecond laser wet etch (FLWE) process. In the FLWE process, the ultrafast laser delivers intensity and time-controlled, programmable arranged, individual pulses to a glass chip. The sample is then subjected to wet-etch processing. The laser pulses change the physical and chemical properties of the glass in the focal spots, and the wet-etch processing that follows carves out a unique 3D microstructures array pattern. Using this method, we fabricated microlens with the diameter: 80 ��m, height: 6.7 ��m and surface roughness: less than 10 nm. We fabricated microstructures on glass surface like microlens arrays with different characteristics like high-fill ratio, high-aspect ratio, controllable shape and arrange, and so on. We also fabricated microstructures like spiral microchannels inside glasses using the FLWE process. The diameter of the spiral microchannel is 20 ��m, and the length-diameter ratio is more than 100. These 3D microchannels will be served as the alternatives of the 2D microstructures in the conventional microfluidic devices.