Abstract:The ultrafast-laser-matter interactions enable "top-down" laser surface structuring, especially for materials difficult to process, with "bottom-up" self-organizing features. The subwavelength scenarios of laser-induced structuring are improved in defects and long-range order by applying positive/negative feedbacks. It is still hardly reported for supra-wavelength laser structuring more associated with complicated thermo/hydro-dynamics. For the first time to the knowledge, the near-field-regulated ultrafast-laser lithography of self-arrayed supra-wavelength micro/nano-pores directly on ultra-hard metallic glass is developed here. The plasmonic hot spots on pre-structures, as the positive feedback, clamped the lateral geometries (i.e., position, size). Simultaneously, it drilled and self-organized into micro/nano-pore arrays by photo-dynamic plasma ablation and Marangoni removal confined under specific femtosecond-laser irradiation, as the negative feedback. The mechanisms and finite element modeling of the multi-physical transduction (based on the two-temperature model), the far-field/near-field coupling, and the polarization dependence during laser-matter interactions are studied. Large-area micro/nano-pore arrays (centimeter scale or larger) are manufactured with tunable periods (1-5 µm) and geometries (e.g., diameters of 500 nm-6 µm using 343, 515, and 1030 lasers, respectively). Consequently, the mid/far-infrared reflectivity at 2.5-6.5 µm iss decreased from ≈80% to ≈5%. The universality of multi-physical coupling and near-field enhancements makes this approach widely applicable, or even irreplaceable, in various applications.

Rapid Production Of Large-Area Deep Sub-Wavelength Hybrid Structures By Femtosecond Laser Light-Field Tailoring

Large Area Uniform Nanostructures Fabricated by Direct Femtosecond Laser Ablation

Dynamically Taming Focal Fields of Femtosecond Lasers for Fabricating Microstructures

Femtosecond Laser Nano/microfabrication Via Three-Dimensional Focal Field Engineering

The double edged sword of femtosecond laser induced periodic surface structures for sub diffraction and high efficient nanotexturing

Fast Fabrication of Large-Area Two-Dimensional Micro/Nanostructure by Femtosecond Laser

Amplitude-phase Optimized Long Depth of Focus Femtosecond Axilens Beam for Single-Exposure Fabrication of High-Aspect-ratio Microstructures

Cylindrically Focused Nonablative Femtosecond Laser Processing of Long‐Range Uniform Periodic Surface Structures with Tunable Diffraction Efficiency

Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Femtosecond Laser Nano-Fabrication With Extended Processing Range

Near-Field-Regulated Ultrafast Laser Supra-Wavelength Structuring Directly on Ultrahard Metallic Glasses

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

Evolution of Femtosecond Laser-Induced Periodic Structures: from Nanoholes to Regular Structures

Nanofabrication mechanism of λ/20 features achieved by coupling field tip enhancement induced with nanosecond laser irradiating AFM probe tip

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

High-Efficiency Fabrication of Geometric Phase Elements by Femtosecond-Laser Direct Writing

Formation of Deep-Subwavelength Structures on Organic Materials by Femtosecond Laser Ablation

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.