Amplitude-phase Optimized Long Depth of Focus Femtosecond Axilens Beam for Single-Exposure Fabrication of High-Aspect-ratio Microstructures

Deng Pan,Bing Xu,Shunli Liu,Jiawen Li,Yanlei Hu,Dong Wu,Jiaru Chu

DOI: https://doi.org/10.1364/ol.389946

2020-01-01

Abstract:Fabrication of high-aspect-ratio (HAR) micro/nanostructures by two-photon polymerization (TPP) has become a hot topic because of the advantages of ultra-high resolution and true 3D printing ability. However, the low efficiency caused by point-by-point scanning strategy limits its application. In this Letter, we propose a strategy for the rapid fabrication of HAR microstructures by combining TPP with an amplitude-phase optimized long depth of focus laser beam (LDFB). The optimization of the LDFB is implemented by modulating the amplitude and phase on a phase-only spatial light modulator, which can suppress the side lobe and smooth energy oscillations effectively. The LDFB is used for rapid fabrication of HAR micropillars and various microstructures, which greatly increases the fabrication efficiency. As a demonstration, several typical HAR microstructures such as assemblies, microchannels, microtubes, and cell scaffolds are prepared. Moreover, the microcapture arrays are rapidly fabricated for the capture of microspheres and the formation of microlens arrays, which show focusing and imaging ability.