Abstract:As a basic micro-optics element, microlens has widespread applications in many fields, whereas the common fabrication methods for microlens compounded from transparent and brittle materials always have a low efficiency and high requirement for environment. Liquid crystal spatial light modulation (SLM) as a light modulation instrument, can realize multi-focus or structured light fields easily, and has important potential application values in optical communication or microfabrication based on ultrafast laser. Herein, a fabrication method is introduced for microlens, which combines the advantages of femtosecond (Fs) laser microfabrication and wetting etch. The key factors influencing the morphology of microlens are analyzed systematically. By introduction of the spatial light field modulation in the femtosecond laser micro/nano fabrication, the number as well as the position of focused spots can be finely controlled, which not only greatly enhances the fabrication efficiency of microlens arrays out of transparent and brittle materials, but also makes it possible to adjust the morphology of femtosecond laser ablation modification dynamically during processing. The application of spatial light field modulation in micro-photonic integrated chip fabrication is well demonstrated.

Optical Nanofabrication of Concave Microlens Arrays

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Fabrication of Concave Spherical Microlenses on Silicon by Femtosecond Laser Irradiation and Mixed Acid Etching.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Single-pulse Writing of a Concave Microlens Array.

Femtosecond Laser Fabrication of Submillimeter Microlens Arrays with Tunable Numerical Apertures

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing

Fabrication of Concave Microlens Arrays by Local Fictive Temperature Modification of Fused Silica

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Versatile Route To Gapless Microlens Arrays Using Laser-Tunable Wet-Etched Curved Surfaces

Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser

Fabrication of a diamond concave microlens array for laser beam homogenization

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process