Abstract:Fast tool servo diamond turning is conventionally a spiral path-based process widely used to efficiently fabricate non-rotationally symmetric surfaces with ultra-fine accuracy. However, the technique is naturally restricted by the demanding bandwidth and resolution requirements, which are directly related to the complexity and size of the machining surface. Moreover, non-smooth trajectories required for machining complex lens array with discontinuities, due to overlapping sharp edges, induce vibrations causing the surface quality to deteriorate, and adding additional barriers to using this conventional technique in broader applications. In this paper, a new diamond machining approach is proposed to address its inherent drawbacks. Using the new method, complex lens array consisting of arbitrary lenslet shapes could be fabricated in an extendable way without the typical limitations. Theoretical investigations of the unique cutting kinematics, motion determination, servo synchronization and compensation will be carried out. To predict the machined surface topography, the surface generation mechanism with consideration of both the kinematic tool/workpiece interaction and elastic recovery of materials is presented. The experimental fabrication of hexagonal micro-sphere lens array, micro-freeform lens array, as well as seamlessly stitched sinusoidal surface with quadrupled areas was highly consistent and aligned with the theoretical predictions, thus demonstrating the effectiveness of the new approach and its potential for broader applications.

Fabrication of a diamond concave microlens array for laser beam homogenization

Transmission of refractive microlens array by reactive ion beam etching

Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Fabrication of concave microlenses on a diamond by a spin coating process.

Optical Nanofabrication of Concave Microlens Arrays

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Single-pulse Writing of a Concave Microlens Array.

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Microlens beam homogenizer for excimer laser processing

Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding

Fabrication of a microlens array on diamond for Shack-Hartmann sensor

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Fabrication of large-area microwells on Polydimethylsiloxane films by femtosecond laser ablation

Beam shaping of vertical cavity surface emitting laser diodes by aspheric microlenses and microlens arrays

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching