Abstract:Double microlens arrays (MLAs) in series can be used to divide and superpose laser beam so as to achieve a homogenized spot. However, for laser beam homogenization with high coherence, the periodic lattice distribution in the homogenized spot will be generated due to the periodicity of the traditional MLA, which greatly reduces the uniformity of the homogenized spot. To solve this problem, a monolithic and highly integrated double-sided random microlens array (D-rMLA) is proposed for the purpose of achieving laser beam homogenization. The periodicity of the MLA is disturbed by the closely arranged microlens structures with random apertures. And the random speckle field is achieved to improve the uniformity of the homogenized spot by the superposition of the divided sub-beams. In addition, the double-sided exposure technique is proposed to prepare the rMLA on both sides of the same substrate with high precision alignment to form an integrated D-rMLA structure, which avoids the strict alignment problem in the installation process of traditional discrete MLAs. Then the laser beam homogenization experiments have been carried out by using the prepared D-rMLA structure. The laser beam homogenized spots of different wavelengths have been tested, including the wavelengths of 650 nm (R), 532 nm (G), and 405 nm (B). The experimental results show that the uniformity of the RGB homogenized spots is about 91%, 89%, and 90%. And the energy utilization rate is about 89%, 87%, 86%, respectively. Hence, the prepared structure has high laser beam homogenization ability and energy utilization rate, which is suitable for wide wavelength regime.

Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization

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High-Performance Laser Beam Homogenizer Based on Double-Sided Concave Microlens

Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency.

Microlens beam homogenizer for excimer laser processing

Optical Nanofabrication of Concave Microlens Arrays

Fabrication of Reflective Non-Imaging Homogeniser Based on Microlens Arrays on Heteroepitaxially Grown Diamond for High-Fluence Laser Beam Shaping

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

Integrated Double-Sided Random Microlens Array Used for Laser Beam Homogenization

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Fabrication of Diamond Microlens Arrays for Monolithic Imaging Homogenizer

Simulation and Experimental Research on a Beam Homogenization System of a Semiconductor Laser

Single-pulse Writing of a Concave Microlens Array.

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

A Homogeneous Focusing System for Diode Lasers and Its Applications in Metal Surface Modification

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching

Wafer-scale High Aspect-Ratio Sapphire Periodic Nanostructures Fabricated by Self-Modulated Femtosecond Laser Hybrid Technology.

Laser micro-structuring of sapphire wafer and fiber

Laser beam homogenization based on a multifocal liquid crystal microlens array