Abstract:Glass microlens arrays (MLAs) have tremendous prospects in the fields of optical communication, sensing and high-sensitivity imaging for their excellent optical properties, high mechanical robustness and physicochemical stability. So far, glass MLAs are primarily fabricated using femtosecond laser modification assisted etching, in which the preparation procedure is time-consuming, with each concave-shaped microlens being processed using a femtosecond laser point by point. In this paper, a new method is proposed for implementing large-scale glass MLAs using glass particle sintering with the assistance of ultraviolet (UV) lithography. The glass particles are dispersed into the photoresist at first, and then immobilized as large-scaled micropillar arrays on quartz glass substrate using UV lithographing. Subsequently, the solidified photoresist is debinded and the glass particles are melted by means of sintering. By controlling the sintering conditions, the convex microlens will be self-assembled, attributed to the surface tension of the molten glass particles. Finally, MLAs with different focal lengths (0.12 to 0.2 mm) are successfully fabricated by utilizing different lithography masks. Meanwhile, we also present the optimization of the sintering parameter for eliminating the bubbles in the microlenses. The main factors that affect the focal length of the microlens and the image performance of the MLAs have been studied in detail.

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

In Situ Fabrication of a Tunable Microlens.

Fabrication of Microglass Lens Mould by Using Ultraprecision Microgrinding Process

Optical Nanofabrication of Concave Microlens Arrays

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Single-pulse Writing of a Concave Microlens Array.

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Fabrication of a diamond concave microlens array for laser beam homogenization

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Controllable Preparation of Fused Silica Micro Lens Array through Femtosecond Laser Penetration-Induced Modification Assisted Wet Etching

An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication

Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization

Ultra-thin, Zoom Capable, Flexible Metalenses with High Focusing Efficiency and Large Numerical Aperture

Rapid Engraving Of Artificial Compound Eyes From Curved Sapphire Substrate

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Control of Diameter and Numerical Aperture of Microlens by a Single Ultra-Short Laser Pulse

Focal Varying Microlens Array.

Fabrication of multi-focal chalcogenide glass microlens arrays based on femtosecond laser-assisted chemical etching method

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering