Abstract:In this study, a kind of electronically controlled liquid-crystal microlens array (LCMLA) with plane swing focus and tunable focal length instead of a commonly microlens array with a fixed focal length and then focus distribution for high-resolution image acquisition, wavefront measurement, and distortion wavefront correction, is proposed. The LCMLA mainly consists of two glass substrates coated with a film of indium-tin-oxide (ITO) transparent material on one side. Each sub-unit top layer is composed of four sub-square electrodes, and the bottom layer is a circular electrode. The key technological steps in electrode fabrication contain an ultraviolet lithography, a dry etching (ICP etching), and final electron beam evaporation and overlay. The current LCMLA can be realized in three operating modes under external driving circuitry, including intensity image acquiring, wavefront measurement and distortion wavefront correction. The LCMLA is only in the image acquisition mode under the condition of no driving electrical signal. As the same driving electrical signals are applied onto the top four sub-electrodes of each sub-unit, the LCMLA is in the wavefront measurement mode. The LCMLA is in the key wavefront correction mode when different driving electrical signals are simultaneously applied onto the top four sub-electrodes of each sub-unit. Experiments show that the focal point of the LCMLA can be moved along the optical axis and over the focal plane by applying appropriate driving voltage signals.

Focal Varying Microlens Array.

Chromatically Multi-Focal Optics Based on Micro-Lens Array Design.

Microlens Arrays Enable Variable-Focus Imaging

Single-pulse Writing of a Concave Microlens Array.

Femtosecond Laser One-Step Direct-Writing Cylindrical Microlens Array on Fused Silica.

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Electronically Controlled Liquid-Crystal Microlens Array with Plane Swing Focus and Tunable Focal Length

High Curvature Concave–Convex Microlens

Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse

Microlens Arrays: Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes (adv. Mater. 23/2012)

Supercritical Lens Array in a Centimeter Scale Patterned with Maskless UV Lithography.

Lens-on-lens Microstructures.

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

High Numerical Aperture Microlens Arrays Of Close Packing

Fabrication of microlens arrays with well-controlled curvature by liquid trapping and electrohydrodynamic deformation in microholes.

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection.

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

A Novel Fabricating Method of Micro Lens-on-Lens Arrays with Two Focal Lengths

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser