Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

Rapid Engraving Of Artificial Compound Eyes From Curved Sapphire Substrate

Artificial Compound Eye-Tipped Optical Fiber for Wide Field Illumination.

Femtosecond Laser Fabrication of 3D Templates for Mass Production of Artificial Compound Eyes

Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array.

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

Design, fabrication and testing of a compact large-field-of-view infrared compound eye imaging system by precision glass molding

Femtosecond Laser Microfabrication of Artificial Compound Eyes

Bioinspired Fabrication of High‐Quality 3D Artificial Compound Eyes by Voxel‐Modulation Femtosecond Laser Writing for Distortion‐Free Wide‐Field‐of‐View Imaging

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Fabrication of a bionic compound eye on a curved surface by using a self-assembly technique

Bioinspired Anti‐Fogging and Anti‐Fouling Artificial Compound Eyes

Fabrication of biomimetic compound eye on single crystal diamond

Bio-inspired hemispherical compound eye camera

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Double-Glued Multi-Focal Bionic Compound Eye Camera

Optical System Design of Bionic Compound Eye with Broad Field of View

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Multi-curvature compound eye with negative-meniscus substrate for improving imaging defocus and spherical aberration