Abstract:The method for designing diffractive microlens with micro-nano-scale structural features, through iterative angular spectrum algorithm, and fabricating diffractive microlens by single-step photolithography and a wet etching process, based on standard micro-nano-technology, was presented. Surface morphology testing shows that the diffractive microlens fabricated is composed of multi-step continuous relief structures with the feature height in the micrometer range, the distribution of the surface micro-nano-structures is circular symmetry, and the transition between the circular rings is smooth. A large number of fine structures with micro-nano-scale features can be clearly observed in the scanning electron microscope on the surface of the diffractive microlens. Surface roughness data tested shows that the surface roughness of fabricated diffractive microlens is in the nanometer range, which has reached the level of optical mirror. The optical aperture is in the micrometer range. The characteristics of the micro-structures on the surface and the optical aperture can be set and arranged flexibly by the iterative angular spectrum algorithm, according to the characteristics and parameters of the incident and outgoing beam. The results of optical characteristics measurement show that the diffractive microlens can focus incident red laser into a very small bright focal spot, and the phenomenon of focusing and defocusing is obvious. The analysis of beam quality shows that the intensity distribution and size of the focal-spot is in accord with pre-calculated results. The fabricated diffractive microlens indicates a very high diffraction efficiency. The experimental results demonstrate that the performances of the diffractive microlens can be further improved by modifying the design algorithm and optimizing the manufacture craft.

Beam shaping of vertical cavity surface emitting laser diodes by aspheric microlenses and microlens arrays

Beam Shaping of Edge-Emitting Diode Lasers Using a Single Double-Axial Hyperboloidal Micro-Lens.

Tailoring Freeform Beam-Shaping Lenses for Edge-Emitting Lasers

High-Performance Laser Beam Homogenizer Based on Double-Sided Concave Microlens

Optical Nanofabrication of Concave Microlens Arrays

Beam-shaping of Laser Diode Stack for Uniform Illumination by Cylindrical Micro-Lenses

Aspherical Anamorphic Lens for Shaping Laser Diode Beam

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Monolithic Microlens VCSELs with High Beam Quality

Metasurface integrated Vertical Cavity Surface Emitting Lasers for programmable directional lasing emissions

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Fabrication of a diamond concave microlens array for laser beam homogenization

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Design and Fabrication of Diffractive Microlens and Analysis of Optical Characteristics

High-Efficiency Fabrication of Aspheric Microlens Arrays by Holographic Femtosecond Laser-Induced Photopolymerization

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Beam collimation of laser diode based on double-focus micro-lens

100% Fill-Factor Aspheric Microlens Arrays (AMLA) with Sub-20-nm Precision