Abstract:Fast tool servo diamond turning is conventionally a spiral path-based process widely used to efficiently fabricate non-rotationally symmetric surfaces with ultra-fine accuracy. However, the technique is naturally restricted by the demanding bandwidth and resolution requirements, which are directly related to the complexity and size of the machining surface. Moreover, non-smooth trajectories required for machining complex lens array with discontinuities, due to overlapping sharp edges, induce vibrations causing the surface quality to deteriorate, and adding additional barriers to using this conventional technique in broader applications. In this paper, a new diamond machining approach is proposed to address its inherent drawbacks. Using the new method, complex lens array consisting of arbitrary lenslet shapes could be fabricated in an extendable way without the typical limitations. Theoretical investigations of the unique cutting kinematics, motion determination, servo synchronization and compensation will be carried out. To predict the machined surface topography, the surface generation mechanism with consideration of both the kinematic tool/workpiece interaction and elastic recovery of materials is presented. The experimental fabrication of hexagonal micro-sphere lens array, micro-freeform lens array, as well as seamlessly stitched sinusoidal surface with quadrupled areas was highly consistent and aligned with the theoretical predictions, thus demonstrating the effectiveness of the new approach and its potential for broader applications.

Fabrication of a microlens array on diamond for Shack-Hartmann sensor

A New Type Shack-Hartmann Wavefront Sensor Using Liquid Crystal Display

Fabrication of monolithic diamond photodetector with microlenses.

Fabrication of Diamond Microlens Arrays for Monolithic Imaging Homogenizer

Fabrication of micro lens array on diamond surface

Fabrication of concave microlenses on a diamond by a spin coating process.

Fabrication of a diamond concave microlens array for laser beam homogenization

Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO 2 Balls Mask.

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Diamond Micro-Lenses with Variable Height Using Self-Assembly Silica-Microsphere-monolayer As Etching Mask

Fabrication of Diamond Microlenses by Chemical Reflow Method.

Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding

Fabrication of a Microlens Array Featuring a High Aspect Ratio with a Swinging Diamond Tool

Microcontact printing fabrication of diamond MEMS cantilevers on silicon substrate

Fabrication of Reflective Non-Imaging Homogeniser Based on Microlens Arrays on Heteroepitaxially Grown Diamond for High-Fluence Laser Beam Shaping

A Tunable Shack–Hartmann Wavefront Sensor Based on a Liquid-Filled Microlens Array

Demonstration of Diamond Microlens Structures by a Three-Dimensional (3D) Dual-Mask Method.

Investigation of the occupancy ratio dependence for microlens arrays on diamond

Fabrication of biomimetic compound eye on single crystal diamond

High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection.

Self-aligned Patterning Technique for Fabricating High-Performance Diamond Sensor Arrays with Nanoscale Precision