On-chip Diamond Integrated Photonic Devices

Hangyu Liu,Mengqi Wang,Pei Yu,Xiangye Ye,Shunyang Shi,Pengfei Wang,Fazhan Shi,Ya Wang,Jiangfeng Du
DOI: https://doi.org/10.1364/dp.2019.90
2019-01-01
Abstract:Single crystal diamond membranes with thicknesses <250nm and diameters of 2 mm are fabricated via deep-etching. The grating couplers and waveguides are integrated on chip of the diamond membrane. The membrane has an overall RMS roughness of <1nm. The diamond chip aims for applications in quantum metrology and quantum computation.
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