Abstract:Microlens arrays (MLAs) made from fused silica possess broad applications in wavefront sensing, optical focusing, beam shaping, etc. However, it is challenging to fabricate the hard-brittle silica MLAs with high accuracy and low cost by conventional manufacturing techniques efficiently. In this work, a novel two-step method, which consists of rapid evaporative ablation and precision melting polishing by CO2 lasers, is proposed to fabricate high-quality MLAs. The first step is to rapidly ablate and engrave micro-pillar arrays (MPAs) with flat groove bottom by high-energy density CO2 lasers. The second step is to precisely polish and shape the flat-topped MPAs into the dome-topped MLAs with good surface roughness (Sa) by low-energy density CO2 lasers. The whole preparation process could be achieved through a set of machining system. Firstly, the geometric dimension (period, p and height, h) of the microlens is determined by the Monte Carlo ray tracing method. Secondly, to diminish the groove depth inconsistency caused by heat accumulation, the multiple ablation compensation strategy is developed. The MPAs (p = 200-400 mu m), of which maximum height error is 7.1%, are prepared in 1 s by the proposed compensation strategy. Then, the MPAs are smoothed into the MLAs by lowenergy density CO2 lasers, and the average Sa is improved from 960 nm to 32.56 nm. Finally, the optical performances of the MLAs are verified from the effectiveness of imaging, focusing and homogenization. The proposed two-step processing method paves a new way to fabricate high-performance MLAs on hard-brittle fused silica with low cost and high efficiency.

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Fabrication of Concave Spherical Microlenses on Silicon by Femtosecond Laser Irradiation and Mixed Acid Etching.

Simple Fabrication of Closed-Packed IR Microlens Arrays on Silicon by Femtosecond Laser Wet Etching

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Rapid Fabrication of A Large-Area Close-Packed Quasi-Periodic Microlens Array on Bk7 Glass

Controlling the Size and Curvature Radius of Concave Microlens Array on Fused Silica by Wet-Etching-assisted with Picosecond Laser

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching.

Fabrication of High-Quality Microlens Arrays on Fused Silica Based on Combined Rapid Evaporative Ablation and Precision Melting Polishing of CO2 Lasers

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Femtosecond Laser One-Step Direct-Writing Cylindrical Microlens Array on Fused Silica.

Large-Scale High Quality Glass Microlens Arrays Fabricated by Laser Enhanced Wet Etching

Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser

Single-step Fabrication of a Microlens Array in Sol–gel Material by Direct Laser Writing and Its Application in Optical Coupling

A Facile Method to Fabricate Close-Packed Concave Microlens Array on Cylindrical Glass

Optical Nanofabrication of Concave Microlens Arrays

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse

Fabrication of Microlens Array with Controllable High NA and Tailored Optical Characteristics Using Confined Ink-Jetting