Abstract:Microlens arrays (MLAs) made from fused silica possess broad applications in wavefront sensing, optical focusing, beam shaping, etc. However, it is challenging to fabricate the hard-brittle silica MLAs with high accuracy and low cost by conventional manufacturing techniques efficiently. In this work, a novel two-step method, which consists of rapid evaporative ablation and precision melting polishing by CO2 lasers, is proposed to fabricate high-quality MLAs. The first step is to rapidly ablate and engrave micro-pillar arrays (MPAs) with flat groove bottom by high-energy density CO2 lasers. The second step is to precisely polish and shape the flat-topped MPAs into the dome-topped MLAs with good surface roughness (Sa) by low-energy density CO2 lasers. The whole preparation process could be achieved through a set of machining system. Firstly, the geometric dimension (period, p and height, h) of the microlens is determined by the Monte Carlo ray tracing method. Secondly, to diminish the groove depth inconsistency caused by heat accumulation, the multiple ablation compensation strategy is developed. The MPAs (p = 200-400 mu m), of which maximum height error is 7.1%, are prepared in 1 s by the proposed compensation strategy. Then, the MPAs are smoothed into the MLAs by lowenergy density CO2 lasers, and the average Sa is improved from 960 nm to 32.56 nm. Finally, the optical performances of the MLAs are verified from the effectiveness of imaging, focusing and homogenization. The proposed two-step processing method paves a new way to fabricate high-performance MLAs on hard-brittle fused silica with low cost and high efficiency.

Fabrication of Concave Spherical Microlenses on Silicon by Femtosecond Laser Irradiation and Mixed Acid Etching.

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Optical Nanofabrication of Concave Microlens Arrays

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Simple Fabrication of Closed-Packed IR Microlens Arrays on Silicon by Femtosecond Laser Wet Etching

Fabrication of High-Quality Microlens Arrays on Fused Silica Based on Combined Rapid Evaporative Ablation and Precision Melting Polishing of CO2 Lasers

Controlling the Size and Curvature Radius of Concave Microlens Array on Fused Silica by Wet-Etching-assisted with Picosecond Laser

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

A Facile Method to Fabricate Close-Packed Concave Microlens Array on Cylindrical Glass

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Fabrication of chalcogenide microlens arrays by femtosecond laser writing and precision molding

Femtosecond Laser One-Step Direct-Writing Cylindrical Microlens Array on Fused Silica.

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process

Fabrication of Concave Microlens Arrays by Local Fictive Temperature Modification of Fused Silica

Morphology adjustable microlens array fabricated by single spatially modulated femtosecond pulse