One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Jianhua Zhu,Chongwei Jin,Xiaoya Duan,Yongkang Guo,Jun Yao
DOI: https://doi.org/10.1016/j.mee.2008.11.049
IF: 2.3
2009-01-01
Microelectronic Engineering
Abstract:Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sensitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11 x 11 gelatin microlens array, are presented in this paper. (C) 2008 Elsevier B.V. All rights reserved.
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