Abstract:In this study, we introduced micro-optical surface formation via femtosecond (fs) laser pulse scanning to chalcogenide polymer (ChP), a promising material for costeffective infrared applications. Employing this method, we successfully fabricated a large-area poly(sulfur-random-(1,3-diisopropenylbenzene)) (S-r-DIB) r-DIB) microlens array (MLA) component. Each micro-concave spherical surface was crafted with a single fs laser pulse, serving as a micro-concave lens surface. We achieved a quasi- periodic MLA sample with over 2 x 105 5 micro-lenslets within a 10 mm x 10 mm footprint. Additionally, precise locating of laser pulse irradiation enabled us to create a hexagonal MLA with a filling factor over 37 %. Morphological investigations and imaging tests confirmed the adequate surface quality of the fabricated components, with its uniformity revealed by the virtual foci grid in near infrared region. To elucidate the forming conditions and mechanisms, we studied the evolution of surface morphology under various laser irradiation conditions. Laser induced damage thresholds of S70-r-DIB30 70- r-DIB 30 were experimentally determined for both 800 nm and 400 nm wavelengths under single- and multi-pulse irradiation scenarios. We identified the optimal fabrication fluence window as 115-205 mJ/cm2 2 with 800 nm single-pulse irradiation. The bandgap of the S70-r-DIB30 70- r-DIB 30 was estimated as 2.06 eV, and energy band analysis confirmed distinctions in ablation morphology. Furthermore, we investigated sub-surface morphology evolution using orthogonal ultrafast pump-probe imaging, revealing diversity compared to traditional inorganic and polymeric optical materials due to differing absorption and etching mechanisms. The elastic wave velocity of 3.2 km/s in this ChP and etching velocity of 0.7 mu m/pulse were experimentally determined. These findings deepen our understanding of ChP material interaction with fs lasers, offering insights for potential applications such as surface engineering, substrate cutting, and micro-structure formation.

Fabrication of microlens array on chalcogenide glass by wet etching-assisted femtosecond laser direct writing

Fabrication of chalcogenide microlens arrays by femtosecond laser writing and precision molding

Fabrication of multi-focal chalcogenide glass microlens arrays based on femtosecond laser-assisted chemical etching method

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

IR Chalcogenide Microlens Arrays

Fabrication of a Chalcogenide Glass Microlens Array for Infrared Laser Beam Homogenization

Femtosecond laser writing of infrared microlens arrays on chalcogenide glass

Transformation of Micropyramid Array to Microlens Array with Massive Quantity of Lenses Using Surface Tension Controlled Molding

Infrared Microlens Formation on Chalcogenide Polymer Surface Via Femtosecond Laser Pulse Ablation

An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication

Chalcogenide Glass Microfibers for Mid-Infrared Optics

Demonstration of High-Performance, Sub-Micron Chalcogenide Glass Photonic Devices by Thermal Nanoimprint

Rapid Fabrication of A Large-Area Close-Packed Quasi-Periodic Microlens Array on Bk7 Glass

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Large-Scale High Quality Glass Microlens Arrays Fabricated by Laser Enhanced Wet Etching

Solution Processing and Resist‐Free Nanoimprint Fabrication of Thin Film Chalcogenide Glass Devices: Inorganic–Organic Hybrid Photonic Integration

Fabrication of High-Quality Microlens Arrays on Fused Silica Based on Combined Rapid Evaporative Ablation and Precision Melting Polishing of CO2 Lasers

Fabrication of Large-Area Concave Microlens Array on Silicon by Femtosecond Laser Micromachining

Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides

One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Femtosecond Laser One-Step Direct-Writing Cylindrical Microlens Array on Fused Silica.