Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

Fan Zhang,Qing Yang,Hao Bian,Minjing Li,Xun Hou,Feng Chen
DOI: https://doi.org/10.3390/ma13163490
IF: 3.4
2020-08-07
Materials
Abstract:Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economical way remains a huge challenge. In this paper, a 3D close-packed hexagonal microlens array (MLA) possessing over 6000 convex hexagonal micro-lenslets with the size of tens of micrometers within a footprint of 10 mm × 10 mm on a Ge20Sb15Se65 ChG surface was successfully fabricated via a precise thermal-mechanical molding process. The master mold of ChG MLA was firstly fabricated by a femtosecond laser-assisted chemical etching process and then transferred on to the surface of the ChG via a precision thermo-mechanical molding process, which resulted in a convex MLA. The morphology, imaging and focusing performances of the as-prepared ChG MLA were investigated and demonstrated the advancement of the method. Meanwhile, the IR transmittance and x-ray diffraction image of the ChG MLAs were measured to verify the structural and compositional stability of the ChG under the given molding conditions. The combined results proved a new route to mass production of miniaturized gapless ChG MLAs for advanced infrared micro-optics.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
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