Abstract:A simple, room-temperature bonding process was developed for the fabrication of glass microfluidic chips. High-quality bonding with high yields (>95%) was achieved without the requirement of clean room facilities, programmed high-temperature furnaces, pressurized water sources, adhesives, or pressurizing weights. The plates to be bonded were sequentially prewashed with acetone, detergent, high-flow-rate (10-20 m/s) tap water, and absolute ethyl alcohol and were soaked in concentrated sulfuric acid for 8-12 h. The plates were again washed in high-flow-rate tap water for 5 min and, finally, with demineralized water. The plates were bonded by bringing the cleaned surfaces into close contact under a continuous flow of demineralized water and air-dried at room temperature for more than 3 h. This bonding process features simple operation, good smoothness of the plate surface, and high bonding yield. The procedures can be readily applied in any routine laboratory. The bonding strength of glass chips thus produced, measured using a shear force testing procedure, was higher than 6 kg/cm(2). The mechanism for the strong bonding strength is presumably related to the formation of a hydrolyzed layer on the plate surfaces after soaking the substrates in acid or water for extended periods. Microfluidic chips bonded by the above procedure were tested in the CE separation of fluorescein isothiocyanate-labeled amino acids.

Microfabrication of Capillary Electrophoresis chips

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

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Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

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Micro Etching Method Inside Microchannels

Microfabrication of Integrated Capillary Electrophoresis Chips and On-chip Sample Injection and Separation

Bonding of Glass Microfluidic Chips at Room Temperatures

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Experimental Study on the Hot Embossing Polymer Microfluidic Chip

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Fabrication of 1-d nanochannels on PMMA substrate by photoresist-free uv lithography and UV-assisted bonding under low temperature

Preparation of hybrid soda-lime/quartz glass chips with wettability-patterned channels for manipulation of flow profiles in droplet-based analytical systems.

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding

Vacuum-assisted Thermal Bonding of Plastic Capillary Electrophoresis Microchip Imprinted with Stainless Steel Template.

Fabrication and Performance of Poly(methyl Methacrylate) Microfluidic Chips with Fiber Cores.

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Glass etching to bridge micro- and nanofluidics.

A simple approach to fabricate multi-layer glass microfluidic chips based on laser processing and thermocompression bonding