Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

A simple approach to fabricate multi-layer glass microfluidic chips based on laser processing and thermocompression bonding

Bonding of Glass-Based Microfluidic Chips at Low- or Room-Temperature in Routine Laboratory

Micro Fabrication of Micro Fluidic Glass Chip Without Clean Room Condition

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

A Simplified Microfabrication Technology For Production Of Glass Microfluidic Chips

Study on a Low-Cost and Fast Fabrication Method of Glass Microfluidic Chips

Hybrid Laser Microfabrication of Three-Dimensional Large-Scale Fused Silica Microfluidic Chips

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Bonding of Glass Microfluidic Chips at Room Temperatures

Water-assisted CO(2) laser ablated glass and modified thermal bonding for capillary-driven bio-fluidic application

Fabrication of a Thermoplastic Multilayer Microfluidic Chip

Fabrication of Fluidic Chips with 1-D Nanochannels on PMMA Substrates by Photoresist-Free UV-lithography and UV-assisted Low-Temperature Bonding

Multilayered skyscraper microchips fabricated by hybrid “all-in-one” femtosecond laser processing

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Microcontact Electrochemical Etching Technique for Rapid Fabrication of Glass-Based Microfluidic Chips

Method For Fabrication Of Microfluidic Glass Chips

Laser Bonding of Multilayer Polymer Microfluidic Chips

Rapid Prototyping of Three-Dimensional Microfluidic Mixers in Glass by Femtosecond Laser Direct Writing

Microchannel Fabrication on Glass Materials for Microfluidic Devices

Water-assisted femtosecond laser ablation for fabricating three-dimensional microfluidic chips