An Overview of ESD Protection in Nanometer IC

李明亮,董树荣,韩雁,杜晓阳,霍明旭,郭维,郭清,黄大海,宋波
2010-01-01
Abstract:On-chip ESD protection design for nanometer IC was reviewed,including characteristics of nanometer IC,failure mechanism and cases analyses of nanometer device,basic ESD protection elements based on advanced CMOS bulk and SOI technology.Heat generation and dissipation,and boundary thermal resistance were investigated,as well as their effects on ESD protection for nanometer IC.Two novel concepts of vertical thermal diffusion and process integration were proposed to enhance the robustness of ESD protection in nanometer IC.
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