Abstract:Micro-electrical discharge machining (micro-EDM) is a good candidate for processing micro-hole arrays, which are critical features of micro-electro-mechanical systems (MEMS), diesel injector nozzles, inkjet printheads and turbine blades, etc. In this study, the wire vibration of the wire electro-discharge grinding (WEDG) system has been analyzed theoretically, and, accordingly, an improved WEDG method was developed to fabricate micron-scale diameter and high-aspect-ratio microelectrodes for the in-process micro-EDM of hole array with hole diameter smaller than 20 μm. The improved method has a new feature of a positioning device to address the wire vibration problem, and thus to enhance microelectrodes fabrication precision. Using this method, 14 μm diameter microelectrodes with less than 0.4 μm deviation and an aspect ratio of 142, which is the largest aspect ratio ever reported in the literature, were successfully fabricated. These microelectrodes were then used to in-process micro-EDM of hole array in stainless steel. The effects of applied voltage, current and pulse frequency on hole dimensional accuracy and microelectrode wear were investigated. The optimal processing parameters were selected using response–surface experiments. To improve machining accuracy, an in-process touch-measurement compensation strategy was applied to reduce the cumulative compensation error of the micro-EDM process. Using such a system, micro-hole array (2 × 80) with average entrance diameter 18.91 μm and average exit diameter 17.65 μm were produced in 50 μm thickness stainless steel sheets, and standard deviations of hole entrance and exit sides of 0.44 and 0.38 μm, respectively, were achieved.

Machining of Micro-electrode Array by WEDM

Study on the Preparation Process for High Accuracy Micro Machining by Wire Electrical Discharge Machining

Experimental study on the influence of workpiece shape on discharge gap and burr in LS-WEDM and the preparation of microelectrode array with specific size

An overview to micro-wire-electrical discharge machining

A study on wire electrochemical micromachining for fabrication of microgrooves

Gap status identification and control of wire electrochemical micromachining

Investigation on a Novel Surface Microstructure Wire Electrode for Improving Machining Efficiency and Surface Quality in WEDM

Precision EDM of Micron-Scale Diameter Hole Array Using in-Process Wire Electro-Discharge Grinding High-Aspect-Ratio Microelectrodes

Wire Electrochemical Machining with Pulsating Radial Electrolyte Supply and Preparation of Its Tube Electrode with Micro-Holes

Helical Surface Creation by Wire Electrical Discharge Machining for Micro Tools

Research on the Key Technologies of Micro Electro Discharge Machining

Research on machining Technology of Electrospark-electrochemical Hybrid Energy Field with tungsten hole

Analysis and Reduction of Process Energy Consumption and Thermal Deformation in a Micro-Structure Wire Electrode Electric Discharge Machining Thin-Wall Component

Precision machining of micro tool electrodes in micro EDM for drilling array micro holes

Sinking ECDM micro-milling of micro-channels with a customized electrode

Research On Micro Ecm Using Micro Array Electrode

Evaluation of Wire Electrical Discharge Machining Performance Features on EN AW-6082 T6 Aluminum Alloy and Optimization of Machining Characteristics

Research On Micro Electrode Fabrication Based On Ecm

Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

Thermo-mechanical analysis and optimal tension control of micro wire electrode

A comprehensive review on wire EDM performance evaluation