Research on the Key Technologies of Micro Electro Discharge Machining

LI Yong,WANG Xianjun,GUO Min,ZHOU Zhaoying,YAN Xiaomin,HU Min
DOI: https://doi.org/10.3321/j.issn:1000-0054.1999.08.012
1999-01-01
Abstract:The research on the key technologies of micro electro discharge machining (micro EDM) was presented. A micro EDM equipment characterized with an inchworm type of micro feed mechanism was developed, in which a wire electro discharge grinding unit, a rotating unit of electrode, RC circuitry for micro electro discharge generation, and the system detecting and controlling the machining process were also included. Then, the experimental research on micro EDM techniques were carried out. The techniques to machine micro elctrode, micro holes with high aspect ratio, micro structures with 3 dimensions on stainless steel and silicon materials were discussed. Micro electrode diameter as small as 25μm and micro holes with minimum size of less than 50μm were obtained. And the maximum aspect ratios of micro electrodes and micro holes exceed 20 and 10 respectively.
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