Research On Micro Electrode Fabrication Based On Ecm

Xiaoyu Ma,Yong Li

2010-01-01

Abstract:Micro electrode fabrication is one of the key technologies in micro electric machining field. This paper presents an improved method to fabricate micro electrode based on electrochemical machining (ECM). At first, an auxiliary hole is machined in a piece of thin metal plate with a nickel wire as cathode, then by reversing the polarity of machining power, the nickel wire is processed as anode in the auxiliary hole and become thinner. Based on the analysis of numerical simulation of electrical field distribution in ECM machining process, the machining parameters that affect the shape and the diameter of micro electrode were discussed, and machining technique was optimized. Experiments were carried on, and a nickel micro electrode of 11 mu m diameter and 600 pm length was obtained. In the same electrochemical cell, micro array holes of 60 mu m diameter were in situ machined on a piece of 100 mu m thickness nickel plate by applying a fabricated micro-electrode of 19 mu m diameter as cathode in ECM process.