Abstract:The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process. Micro ECM urgently requires gap status monitoring and feedback control. To realize gap status monitoring, a sensors-integrated silicon electrode, with a micro temperature sensor and a micro conductivity sensor on the silicon electrode near-front sidewall, is proposed innovatively in this study. Based on bulk silicon process and electroplating process, sensors-integrated silicon electrodes are designed and fabricated. Based on the signal processing system built for the temperature and conductivity sensor, the temperature and conductivity detection functions are verified and the sensors are calibrated. Micro ECM experiments with sensors-integrated silicon electrodes are carried out and micro holes with 200 μm depth are machined. For the conductivity sensor on the sensors-integrated silicon electrode, due to the affection of electrolytic environment, the function surface is contaminated and damaged, and the structural design needs to be further improved. For the temperature sensor, it is not affected by the electrolytic environment due to insulation-film's protection, and reliable temperature monitoring is achieved in micro ECM. The detection results indicate that the temperature inside the machining gap has increased by 20 °C due to the electrochemical thermal effect and resistance thermal effect in micro ECM, and the temperature shows an increasing trend while machining depth increasing. The feasibility of process monitoring with sensors-integrated silicon electrode in micro ECM is preliminarily verified.

Fabrication Technology and Investigation of Silicon-based Tool Electrodes for Micro ECM

Silicon-based Tool Electrodes for Micro Electrochemical Machining

Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining

Effect of Anisotropically-etched Silicon Electrode on Electrolytic Products Flow in Micro ECM

Side-Insulation of Tool Electrode and Application in Micro ECM

Fabrication of a Tool Electrode with Hydrophobic Features and Its Stray-Corrosion Suppression Performance for Micro-electrochemical Machining

A Shunt-Assisted Silicon Electrode for Micro Electrochemical Machining

Design and Fabrication of a Sensors-integrated Silicon Electrode for Gap Status Monitoring in Micro Electrochemical Machining

Research On Micro Electrode Fabrication Based On Ecm

Wear mechanism and preventive method of silicon electrodes in micro ECM

Experimental Study of Micro Electrochemical Milling with Side-Insulated Electrode

A study on wire electrochemical micromachining for fabrication of microgrooves

Novel Structure Of A Sidewall-Insulated Hollow Electrode For Micro Electrochemical Machining

Electrochemical micro-machining of high aspect ratio micro-tools with a reverse conical shape tip using electrolyte liquid membrane

Experimental Study on Micro Electrochemical Machining with Hydrophobic Side Insulation Electrode

Influence of Side-Insulation Film on Hybrid Process of Micro EDM and ECM for 3D Micro Structures

Numerical and experimental analysis of high-aspect-ratio micro-tool electrode fabrication using controlled electrochemical machining

Research On Micro Ecm Using Micro Array Electrode

A Profile Shaping and Surface Finishing Process of Micro Electrochemical Machining for Microstructures on Microfluidic Chip Molds

Simulation Analysis and Experimental Validation of Cathode Tool in Electrochemical Mill-Grinding of Ti6Al4V

Fabrication of Large Scale Bi-layer Microstructure through Electrochemical Nanoimprinting