Fabrication of a Tool Electrode with Hydrophobic Features and Its Stray-Corrosion Suppression Performance for Micro-electrochemical Machining

Guodong Liu,Hao Tong,Haoyang Shi,Yong Li,Junjie Li
DOI: https://doi.org/10.1021/acs.langmuir.1c03439
IF: 3.9
2022-01-01
Langmuir
Abstract:Micro-electrochemical machining (micro-ECM) can machine microstructures with excellent surface integrity on difficult-to-cut alloys. During micro-ECM, stray corrosion results in tapered sidewalls of machined structures. To suppress the stray corrosion, a novel tool electrode with the sidewall insulation of a gas film is proposed by fabricating the metal tool sidewall into a hydrophobic surface. The sidewall surface is designed to be characterized with spherical array cavities (radius of 500 nm) acting as the hydrophobic features, enhancing the gas-shielding effect of the gas film under electrolysis. The fabrication process of the hydrophobic sidewall is described in detail, including the self-assembly procedure of a monolayer template of Phi(1 mu m) polystyrene microspheres, the copper-electroforming procedure for filling the microspheres' gaps, and the removal procedure for forming spherical array cavities. The fabricated tool electrode (Phi(500) (mu m)) obtains the hydrophobic features of a contact angle of up to 138 degrees. As a result, bubbles generated on the tool surface can form an air-electrolyte interface instead of a dispersed bubble cluster. Micro-ECM experiments of microstructures verify that the novel tool electrode can improve machining accuracy by suppressing sidewall stray corrosion.
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