Abstract:Micromachining is becoming the cutting-edge of high-tech manufacturing because of the increasing industrial demand for supersmooth surfaces and functional three-dimensional micro/nano-structures in microelectromechanical systems, ultra-large scale integrated circuits, miniaturized total analysis systems, precision optics and so on. Taking advantage of no tool wear, no surface stress, environmental friendliness, simple operation, and low cost, electrochemical micromachining (ECM) has an irreplaceable role in micromachining. We present here our perseverant research in the last two decades on how to “confine” the ECM processes to occur at micrometer or even nanometer scale, that is, to ensure ECM with nanoscale accuracy. We have been developing the confined etchant layer technique (CELT) to fabricate three-dimensional micro- and nanostructures (3D-MNS) on different metals and semiconductor materials since 1992. In general, there are three procedures in CELT: (1) generating the etchant on the surface of the tool electrode by electrochemical or photoelectrochemical reactions; (2) confining the etchant in a depleted layer with a thickness of micro- or nanometer scale; (3) feeding the tool electrode to etch the workpiece. Scavengers, which can react with the etchant, are usually adopted to form a confined etchant layer. Through the subsequent homogeneous reaction between the scavenger and the photo or electrogenerated etchant in the electrolyte solution, the diffusion distance of the etchant is confined to micro- or nanometer scale, which ensures the nanoscale accuracy of electrochemical machining. However, because the thickness of the electrolyte solution between the tool electrode and the workpiece are usually at micro/nano-meter scale, it is a challenge to solve the problems of potential distribution and mass transfer in the ultra-thin layer electrolyte cell. In this presentation, we will introduce our recent work on the external physical field induced electrochemical reactions in which there is no need of 2-electrode or 3-electrode system in the conventional electrochemical system.

A Shunt-Assisted Silicon Electrode for Micro Electrochemical Machining

Silicon-based Tool Electrodes for Micro Electrochemical Machining

Effect of Anisotropically-etched Silicon Electrode on Electrolytic Products Flow in Micro ECM

Novel Structure Of A Sidewall-Insulated Hollow Electrode For Micro Electrochemical Machining

Wear mechanism and preventive method of silicon electrodes in micro ECM

Research on Conductive-Material-filled Electrodes for Sidewall Insulation Performance in Micro Electrochemical Machining

Reduction of Stray Currents in Counter-Rotating Electrochemical Machining by Using a Flexible Auxiliary Electrode Mechanism

Fabrication of a Tool Electrode with Hydrophobic Features and Its Stray-Corrosion Suppression Performance for Micro-electrochemical Machining

Design and Fabrication of a Sensors-integrated Silicon Electrode for Gap Status Monitoring in Micro Electrochemical Machining

Fabrication Technology and Investigation of Silicon-based Tool Electrodes for Micro ECM

Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining

A Profile Shaping and Surface Finishing Process of Micro Electrochemical Machining for Microstructures on Microfluidic Chip Molds

Method for controlling the area of the electrolyte outlets in the flow field simulation and experimental verification of electrochemical machining

Study On Micro Electrochemical Machining At Micro To Meso-Scale

Experimental Study of Micro Electrochemical Milling with Side-Insulated Electrode

Electrochemical Machining of Micro Slots Using Shaped Electrode

Electrochemical Machining of a Convex Strips Structure on a Revolving Part by Using Site Directed Power Interruption

Electrostatic Actuating Bendable Flat Electrode for Micro Electrochemical Machining

Research On Micro Ecm Using Micro Array Electrode

(Invited) Electrochemical Micromachining Based on Confined Etching

Photocatalytic-Assisted Electrochemical Machining of SiCp/Al: An Exploration of Mechanisms and Effects