Micro Electro Machining Technologies for Industrial Application

Li Yong
DOI: https://doi.org/10.3969/j.issn.1009-279X.2009.z1.012
2009-01-01
Abstract:Micro electro machining technologies including micro-EDM and micro-ECM are developed to drill micro holes and shape 3D micro structures for industrial purposes.An automatic feed mechanism is designed for micro EDM equipment to compensate electrode wear and guide micro electrode.A servo scanning EDM method is proposed for shaping 3D micro structures,in which electrode wear is compensated on real time by servo control of discharge gap.Then a micro ECM process is also tried to drill array micro holes.Micro holes with minimum diameter of 100 μm can be drilled efficiently in the EDM process.3D micro structures within area of 1 mm2 square can be shaped conveniently by use of the servo scanning EDM process.The micro ECM process proposed will be further studied and used into the machining of array micro holes and 3D micro structures.
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