A Hybrid Process Of Micro Edm And Micro Ecm For 3d Micro Structures

Hu Manhong,Li Yong,Tong Hao,Ma Xiaoyu
DOI: https://doi.org/10.3969/j.issn.1009-279X.2010.02.008
2010-01-01
Abstract:A hybrid process of Micro EDM and Micro ECM for 3D micro structures is proposed and investigated experimentally. It integrates Micro EDM and Micro ECM on one equipment setup. Among that, 3D servo scanning Micro EDM is used to remove most part of workpiece material with fast machining speed, and Micro ECM milling is to remove the residual material and to form the finished structure surface. In machining experiments, a square column structure with size of 410 x 406 x 181 mu m(3) was machined by the hybrid process. The MMRs of Micro EDM and Micro ECM are 31 182 mu m(3)/s and 11 017 mu m(3)/S. The experimental results demonstrate that the hybrid process has combined advantages of high machining efficiency of servo scanning Micro EDM and good surface quality of Micro ECM milling.
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