Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

Hao Tong,Yong Li,Long Zhang

DOI: https://doi.org/10.1088/1361-6439/aaa04b

2018-01-01

Journal of Micromechanics and Microengineering

Abstract:Array micro cavities are useful in many fields including in micro molds, optical devices, biochips and so on. Array servo scanning micro electro discharge machining (EDM), using array micro electrodes with simple cross-sectional shape, has the advantage of machining complex 3D micro cavities in batches. In this paper, the machining errors caused by offline-fabricated array micro electrodes are analyzed in particular, and then a machining process of array servo scanning micro EDM is proposed by using on-machine fabricated array micro electrodes. The array micro electrodes are fabricated on-machine by combined procedures including wire electro discharge grinding, array reverse copying and electrode end trimming. Nine-array tool electrodes with Phi 80 mu m diameter and 600 mu m length are obtained. Furthermore, the proposed process is verified by several machining experiments for achieving nine-array hexagonal micro cavities with top side length of 300 mu m, bottom side length of 150 mu m, and depth of 112 mu m or 120 mu m. In the experiments, a chip hump accumulates on the electrode tips like the built-up edge in mechanical machining under the conditions of brass workpieces, copper electrodes and the dielectric of deionized water. The accumulated hump can be avoided by replacing the water dielectric by an oil dielectric.