Algorithms and machining experiments to reduce depth errors in servo scanning 3D micro EDM

hao tong,long zhang,yong li
DOI: https://doi.org/10.1016/j.precisioneng.2014.02.002
IF: 3.315
2014-01-01
Precision Engineering
Abstract:•Depth errors’ causes of servo-scanning 3D micro EDM are analyzed.•A layer depth constrained algorithm is proposed to avoid the over-cutting errors.•An S-curve accelerating algorithm is proposed to compensate the insufficient-machining errors.•Machining experiments of 3D micro cavities <800μm have verified the proposed algorithms.
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